Patents Assigned to IBSS Group
  • System and method for adaptive cleaning of a high-vacuum chamber
    Patent number: 12706285
    Abstract: A system and a method for an adaptive plasma-cleaning process for a reaction chamber allow continual monitoring by a residual gas analyzer, while active plasma-cleaning is carried out in the reaction chamber. The system includes a valve system and a pump system that allow the residual gas analyzer to perform continual monitoring at a favorable pressure condition that is independent of the active plasma-cleaning process.
    Type: Grant
    Filed: September 13, 2024
    Date of Patent: August 11, 2026
    Assignee: IBSS Group
    Inventors: Larry Tran, Vince Carlino, George Naugle