Patents Assigned to ICT Integrated Circuit Testing Gesellschaft
  • Apparatus and method for controlling the beam current of a charged particle beam
    Patent number: 7345436
    Abstract: An apparatus for producing a beam of charged particles is provided, which comprises an emitter (1, 2) and a switching device (3) adapted to switch between first, second and third beam current levels, wherein the beam current at said first current level is suitable for writing a pixel of an image on the surface of a sample, the beam current at said second current level is suitable for not writing a pixel on the surface of said sample, and the beam current at said third current level is lower than the beam current at the second current level.
    Type: Grant
    Filed: March 29, 2004
    Date of Patent: March 18, 2008
    Assignee: ICT Integrated Circuit Testing Gesellschaft
    Inventor: Josef Sellmair
  • Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
    Patent number: 7253417
    Abstract: The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.
    Type: Grant
    Filed: December 12, 2003
    Date of Patent: August 7, 2007
    Assignee: ICT Integrated Circuit Testing Gesellschaft
    Inventors: Jürgen Frosien, Pavel Adamec