Patents Assigned to ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftecknik mbH
  • Lens coil cooling of a magnetic lens
    Patent number: 8044368
    Abstract: A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic field, a pole piece to guide the magnetic field, a heat shield, which is connected to a cooling system, and a thermal insulation layer provided between the heat shield and the coil.
    Type: Grant
    Filed: March 13, 2008
    Date of Patent: October 25, 2011
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftecknik mbH
    Inventor: Pavel Adamec