Patents Assigned to ICT Integrated Circuit Testing Gesellschaft für Halbletterprüftechnik mbH
  • Patent number: 10861666
    Abstract: A method of operating a charged particle gun is described. The method includes providing an emitter at a first emitter potential within the charged particle gun and providing a trapping electrode at a first electrode potential within the charged particle gun, wherein the first emitter potential and the first electrode potential is provided to have an electrical field of essentially zero at the emitter and at the trapping electrode; switching the trapping electrode from the first electrode potential to a second electrode potential different from the first electrode potential to generate an electrostatic trapping field at the trapping electrode; and after switching the trapping electrode from the first electrode potential to the second electrode potential, switching on an electrostatic emission field at the emitter.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: December 8, 2020
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbletterprüftechnik mbH
    Inventor: Dieter Winkler