Abstract: A charged particle beam device is described. The charged particle beam device includes an emitter adapted for emitting a primary charged particle beam, a specimen location adapted for holding a specimen, from which secondary and/or backscattered charged particles are released on impingement of the primary charged particle beam, a detection unit adapted for detecting the secondary particles and/or secondary particles, and a beam guiding unit adapted for guiding the primary charged particle beam to the detection unit for impingement of a primary charged particle beam on the detection unit.
Type:
Grant
Filed:
February 5, 2009
Date of Patent:
July 19, 2011
Assignee:
ICT Intergrated Circuit Testing Gesellschaft für Halbeiterprüftechnik mbH