Abstract: The present invention relates to a method for manufacturing high-resolution microfluidic structures by means of the modification of the sealing temperature and photolithography.
Type:
Grant
Filed:
January 12, 2007
Date of Patent:
October 9, 2012
Assignee:
Ikerlan Centro de Investigaciones Tecnologias, S. Coop.
Inventors:
Francisco Javier Blanco Barro, Jorge Elizalde Garcia, Jesús Miguel Ruano Lopez
Abstract: The present invention refers to a procedure for the manufacture of micro-nanofluidic devices for flow control such as microvalves, micropumps and flow regulators, using a photodefinable polymer and an elastomer as structural materials and to the micro-nanofluidic devices for flow control obtained by said procedure.
Type:
Application
Filed:
November 2, 2007
Publication date:
December 30, 2010
Applicant:
IKERLAN CENTRO DE INVESTIGACIONES TECNOLÓGICAS, S.
Inventors:
Luis José Fernandez Ledesma, María Tijero Serna
Abstract: The present invention relates to a method for manufacturing micro/nanofluidic devices that incorporate overhanging micromechanical and metal components monolithically integrated with the fluidic circuitry.
Type:
Application
Filed:
May 22, 2007
Publication date:
December 2, 2010
Applicant:
Ikerlan Centro De Investigaciones
Inventors:
Fco. Javier Blanco Barro, María Aguirregabiria Izaguirre, Aitor Ezkerra Fernández, Janette Lillia Schulze, Jesús Miguel Ruano López, Mayora Oria