Abstract: A particle beam generator has a vacuum chamber, a magnet which generates a constant magnetic field in the vacuum chamber, acceleration electrodes which generates a magnetic field in a direction perpendicular to the direction of the magnetic field generated by the magnet in the vacuum chamber, a take-out electrode which takes out charged particles accelerated in the vacuum chamber; and a target cell provided at a position at which the charged particles taken out by the taken-out electrode strikes. At least a part of surfaces exposed to the charged particles of the vacuum chamber, the acceleration electrodes, the take-out electrode and/or the target cell is made of a material including an element having atomic number larger than copper.

Abstract: The invention relates to forming an image from a random particle flux. Particles of the flux are detected by a discrete-cell detector having a cell size finer than conventionally used. Preferably, the cell size is sufficiently small that almost all cells of the detector count at most one particle during the image acquisition time. The count data are filtered through a band-limiting filter whose bandwidth lies between a bandwidth corresponding to the detector cell size and the flux bandwidth of interest. Outliers may be flattened before filtering. Neighborhoods around each cell are evaluated to differentiate stationary regions (where neighboring data are relatively similar) from edge regions (where neighboring data are relatively dissimilar). In stationary regions, a revised estimate for a cell is computed as an average over a relatively large neighborhood around the cell. In edge regions, a revised estimate is computed as an average over a relatively small neighborhood.