Patents Assigned to IMS Ionen Mikrofabrikations Systems Gesellschaft mbH
  • Process for making a transmission mask
    Patent number: 4780382
    Abstract: The invention is a process for making a transmission mask which can be used in structuring a semiconductor substrate in an additive or subtractive way by two galvanic depositions of layers of which one provides the mask structure and the other a grid structure covering the openings in the mask structure. The thickness of the structure is freely selectable self-adjusting (within the limits of the known engineering methods). The aim is the production of a transmission mask with a constant effective thickness above the mask surface.
    Type: Grant
    Filed: November 13, 1986
    Date of Patent: October 25, 1988
    Assignee: IMS Ionen Mikrofabrikations Systems Gesellschaft mbH
    Inventors: Gerhard Stengl, Hans Loschner