Abstract: A micromachining method, a die manufacturing method, and a micromachining apparatus performing accurate micromachining on a surface of a workpiece at high speed. A micromachining apparatus having a cutting tool and a vibration unit for vibrating the cutting tool in a first direction is used. The angle formed between an average cutting direction of the cutting tool and the first direction is set to fall within a range of 20° to 120°. Recesses and protrusions are formed on a surface of a workpiece as a result of machining by the cutting tool which is vibrating in the first direction.