Abstract: An apparatus for identifying an unknown reactive gas in a carrier gas, utilizing a sensor with a diffusion limited inlet. The apparatus includes a manifold of predetermined volume having an inlet and outlet, an inlet valve in the manifold inlet, an outlet valve in the manifold outlet, a gas detector in communication with the manifold, a diffusion barrier disposed between the manifold and the gas detector for limiting diffusion of gas from the manifold into the gas detector, means for opening and closing the inlet and outlet valves, means for detecting an output signal from the gas detector, means for determining a coefficient of diffusion for the reactive gas from the output signal, and means for identifying and quantifying the reactive gas from the determined coefficient of diffusion.