Abstract: A multi-tier capacitor structure has at least one multi-tier conductive layer. At least one conductive via passes through the multi-tier conductive layer. When currents flow through the conductive via, different current paths are presented in the conductive via in response to different current frequency; in other words, different inductor is induced. Therefore, a single plate capacitor structure has function of hierarchical decoupling capacitor effect.
Type:
Application
Filed:
July 15, 2008
Publication date:
May 21, 2009
Applicant:
Industrial Technology Reaserch Institute
Inventors:
Shih-Hsien Wu, Min-Lin Lee, Shinn-Juh Lai, Shur-Fen Liu