Patents Assigned to INDUSTRIAL TECHNOLOGY RESEARCH INSTUTITE
  • MEMS differential actuated nano probe and method for fabrication
    Publication number: 20060016986
    Abstract: A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.
    Type: Application
    Filed: September 6, 2005
    Publication date: January 26, 2006
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTUTITE
    Inventors: Shih-Yi Wen, Hsiao-Wen Lee, Jui-Ping Weng, Ming-Hung Chen