Abstract: A fuse of a semiconductor device may include: a fuse link suitable for extending in a first direction and connecting first and second electrodes; a dummy strip suitable for extending in the first direction, and with a predetermined distance from the fuse link in a second direction perpendicular to the first direction; and an air channel formed between the fuse link and the dummy strip to contact with the fuse link.
Type:
Grant
Filed:
October 20, 2017
Date of Patent:
March 31, 2020
Assignees:
SK hynix Inc., INDUSTRY-ACAMEDIA COOPERATION GROUP OF SEJONG UNIVERSITY
Inventors:
Deok-Kee Kim, Jae Hong Kim, Seo Woo Nam