Patents Assigned to Inficon GmbH
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Patent number: 12730031Abstract: A leak detection device for combined integral and localizing leak detection, comprising a test specimen port (14), a test specimen high vacuum pump (16), the inlet of which is connected with the test specimen port (14), at least one pre-vacuum pump (20), the inlet of which is connected via a test specimen line (18) with the outlet (19) of the test specimen high vacuum pump (16), and a gas detector (32) connected with the pre-vacuum pump (20), which is connected via at least a first gas line (28) with the test specimen high vacuum pump (16), the test specimen line (18) and/or the specimen port (14) such that gas from the test specimen port (14) is supplied to the gas detector (32) via the gas line (28) for gas analysis, characterized in that a gas pressure measuring volume (22) connected with a gas pressure sensor is configured in the test specimen line (18) such that, during the gas measurement with the gas detector (32), an integral leak detection can be carried out by measuring the pressure profile in the gType: GrantFiled: June 1, 2022Date of Patent: September 8, 2026Assignee: INFICON GmbHInventors: Silvio Decker, Simon Mathioudakis, Randolf Paul Rolff
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Publication number: 20260251522Abstract: A method for determining an ambient concentration of a light gas uses a mass-spectrometric counterflow leak detection device having a mass-spectrometric gas detector, a high vacuum pump connected to the gas detector, and a pre-vacuum pump connected to the high vacuum pump. The pre-vacuum pump has a gas outlet open to the atmosphere. The pre-vacuum pump is used to evacuate the high vacuum pump and/or the gas detector. Air from the environment of the pre-vacuum pump is admitted into the running pre-vacuum pump or into its inlet-side pre-vacuum area in such a way that a gas component of the admitted air/gas mixture, which is lighter than air, is introduced in counterflow into the gas detector and is detected there, while the remaining gas components of the introduced air mixture are delivered to the surrounding atmosphere through the outlet of the pre-vacuum pump.Type: ApplicationFiled: May 25, 2023Publication date: August 27, 2026Applicant: INFICON GMBHInventor: Simon MATHIOUDAKIS
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Publication number: 20260251523Abstract: A leak detection device detects a gas leak in a test specimen. The leak detection device includes a port for receiving the test specimen or is connected to a test chamber holding the test specimen, a gas conduction path defined between the port and a valve for selectively closing the gas conduction path, a compressor pump arranged in the gas conduction path, and a compression volume. The compressor pump has an inlet and an outlet. The inlet is connected to the port. The compression volume is arranged in the gas conduction path between the outlet of the compressor pump and the valve so that the compressor pump compresses gas from the port into the compression volume when the valve is closed. The compression volume is connected to a gas pressure sensor for measuring the pressure inside the compression volume.Type: ApplicationFiled: April 17, 2023Publication date: August 27, 2026Applicant: INFICON GMBHInventors: Daniel WETZIG, Silvio DECKER
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Patent number: 12716803Abstract: A leak detection device (10) comprising a gas detector (12), a vacuum pump (14), a port for a test object (22) and a gas conducting path connecting the port to the gas detector (12) and the vacuum pump (14), is characterized in that the port (16) comprises a controllable isolation valve (20) for the selective opening or closing of the port (16), and that a pressure measurement device (24) for measuring the pressure at the port (16) is provided and the connection line (18) comprises a controllable venting valve (V3, V3a) for selectively allowing gas from the surrounding atmosphere to flow to the port (16) in a pulse-like manner, wherein the leak detection device (10) is configured to measure the pressure p(t1) at the port (16) at a first time t1 before the opening of the venting valve, thereafter to open and close the venting valve in a pulse-like manner and to measure the pressure p(t2) at the port (16) at least at a time t2>t1 after the closing of the venting valve and to determine, whether the isolationType: GrantFiled: May 31, 2022Date of Patent: August 25, 2026Assignee: INFICON GMBHInventor: Jörn Liebich
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Patent number: 12710330Abstract: A method for evaluating the measuring signal of a vacuum leak detector comprising a vacuum pump (16) and a test chamber (12) connected with the vacuum pump (16) and a gas detector (14) connected with the test chamber (12), characterized by determining the system time constant ? of the vacuum leak detector, wherein the system time constant ? is the duration of the system-related rise of the measured signal in response to a gas component escaped through a leak in the test object or the duration of the system-related drop of the measured signal in response to a gas component no longer from a leak in the test object.Type: GrantFiled: July 12, 2022Date of Patent: August 18, 2026Assignee: INFICON GmbHInventor: Decker Silvio
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Patent number: 12687449Abstract: A device for leak detection on a test specimen, comprising a mass spectrometer (12), an at least three-stage turbomolecular pump (14), the input stage (18) of which is connected to the mass spectrometer (12) and which has a first intermediate gas inlet arranged between the input pump stage and the intermediate pump stage (26) and a second intermediate gas inlet arranged between the intermediate pump stage (26) and the output pump stage (24), an at least two-stage booster pump, the input pump stage (46) of which can be connected to the test specimen to be examined and which has an intermediate gas outlet (54) arranged between the input pump stage (46) and the output pump stage (48) and a pre-vacuum pump (22) which is connected to the outlet (20) of the output pump stage (24) of the turbomolecular pump (14) and is configured to generate a pre-vacuum pressure of less than 50 mbar at the outlet (20) of the turbomolecular pump (14) and to evacuate it against atmospheric pressure, characterized in that the intermedType: GrantFiled: September 21, 2021Date of Patent: July 21, 2026Assignee: INFICON GMBHInventors: Silvio Decker, Simon Mathioudakis
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Patent number: 12687450Abstract: A test leak device for functional testing of a leak detection device for the leak test of a test specimen (14) filled with a liquid (12) having an internal pressure that is lower than atmospheric pressure, comprising a reservoir (102) filled with a test liquid (104), wherein the test liquid (104) has a vapor pressure of less than 500 mbar at room temperature, and the reservoir (102) comprises an outlet (106), and a pump (100) cooperating with the reservoir (102) and configured to convey the test liquid (104) from the reservoir (102) in such a way that the test liquid (104) escapes from the pump (100) through the outlet (106) in liquid form from the reservoir (102).Type: GrantFiled: February 3, 2022Date of Patent: July 21, 2026Assignee: INFICON GMBHInventor: Heike Hilgers
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Publication number: 20260168881Abstract: A carrier gas leak detection system for leak detection on a test specimen, including a gas detector, a test chamber having at least a first test chamber inlet, a test chamber outlet and a test chamber vacuum pump evacuating the test chamber outlet, a first gas line connecting the test chamber outlet to the detector volume inlet and the test chamber vacuum pump in a gas-conducting manner, a second flow throttle for presetting the carrier gas flow through the first test chamber inlet, a second gas line connecting the test chamber outlet to the test chamber vacuum pump parallel to the first gas line, a third flow throttle in a detector section of the first gas line between a first connection point and the detector volume inlet, and a fourth flow throttle in the second gas line between the test chamber outlet and the first connection point.Type: ApplicationFiled: October 2, 2023Publication date: June 18, 2026Applicant: INFICON GMBHInventors: Daniel WETZIG, Maximilian REISMANN, Hjalmar BRUHNS
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Patent number: 12618739Abstract: In a test leakage device (10) for testing the functionality and for calibrating a gas leak detection device having an evacuable test chamber (34) for receiving a test object and the test leakage device (10), wherein the test leakage device (10) has a base (12), a cover (16) and at least one side wall (14) connecting the base (12) to the cover (16), which surround an interior space (20) which can be filled with a test gas or a test liquid, provision is made for the base (12) to have a membrane (24) which is permeable to the test gas or constituents of the test liquid, and for mutually opposite sections of that inner side (18) of the side wall (14) which faces the interior space (20) to be at a greater distance from one another in the region of the cover than in the region of the base.Type: GrantFiled: May 25, 2021Date of Patent: May 5, 2026Assignee: INFICON GMBHInventors: Daniel Wetzig, Maximilian Reismann, Josef Grenz, Hendrik Van Triest
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Patent number: 12603623Abstract: An amplifier device for receiving currents, comprising a first current path for measuring smaller currents of less than 100 pA, an input amplifier device included in the first current path, having at least one first amplifier, an output, an inverting input, a first feedback path connecting the output to the inverting input, and a feedback element included in the first feedback path, wherein the first amplifier has at least one protective element, a second current path for measuring larger currents with a maximum current of at least 10 times the current to be received in the first current path, characterized in that at least one of the protective elements of the amplifier is part of the second current path.Type: GrantFiled: March 6, 2020Date of Patent: April 14, 2026Assignee: INFICON GMBHInventor: Norbert Rolff
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Patent number: 12540874Abstract: A sniffer probe for a gas leak detector, which gas leak detector has a vacuum pump for drawing in gas through the sniffer probe in accordance with the sniffing principle and a gas detector for analyzing the gas flow drawn in, the sniffer probe comprising: a gas inlet for the gas flow drawn in, a gas outlet, which can be connected to the gas leak detector, and a channel, which gas-conductingly connects the gas inlet to the gas outlet, is characterized in that the sniffer probe has a bypass opening, which gas-conductingly connects a portion of the channel located between the gas inlet and the gas outlet to the outer environment of the sniffer probe, the bypass opening having an actuatable closure for selectively opening and closing the bypass opening.Type: GrantFiled: July 8, 2021Date of Patent: February 3, 2026Assignee: INFICON GmbHInventors: Silvio Decker, Sebastian Weiss
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Publication number: 20260016360Abstract: A sniffing leak-detection device (10) with a measuring-gas inlet (28) for taking in measuring gas at a measuring location, wherein the measuring gas is to be investigated for the presence of a possible leakage gas at the measuring location, a reference-gas inlet (30), different from the measuring-gas inlet (28), for taking in reference gas from the surroundings of the measuring location, a gas-feeding pump (16), feeding the gas taken in through the measuring-gas inlet (28) and through the reference-gas inlet (30), a switching valve (20), which is connected to the gas-feeding pump (16) by a gas-conducting path (22) and is connected in a gas-conducting manner to the reference-gas inlet (30) and to the measuring-gas inlet (28) and formed in such a way that, dependent on the switching state of the switching valve (20), the gas-feeding pump (16) takes in gas through the measuring-gas inlet (28) and/or through the reference-gas inlet (30), and a gas sensor (18) for analyzing the gas taken in by the gas-feeding pumpType: ApplicationFiled: July 12, 2023Publication date: January 15, 2026Applicant: INFICON GMBHInventor: Daniel WETZIG
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Patent number: 12492960Abstract: A vacuum leak detection system may comprise a test chamber unit having a test chamber gas inlet and a test chamber gas outlet, a gas detection unit having a gas detection gas inlet and a gas detection gas outlet, and a gas control unit connecting the test chamber gas inlet and the test chamber gas outlet to the gas detection gas inlet and the gas detection gas outlet, which is connected to the test chamber unit and to the gas detection unit, and which has separate gas line paths for optionally connecting the gas inlets and the gas outlets of the test chamber unit and the gas detection unit, wherein the gas control unit has a third gas inlet which is open towards the atmosphere and which can be connected to the test chamber gas inlet via a gas line path running through the gas control unit.Type: GrantFiled: July 15, 2021Date of Patent: December 9, 2025Assignee: INFICON GmbHInventors: Daniel Wetzig, Maximilian Reismann, Josef Grenz, Hendrik Van Triest
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Patent number: 12455207Abstract: A method for detecting a test gas escaping from a leak in a test specimen that uses an optical sensor to measure optical radiation reflected or emitted from the test specimen or its background at different points in time and comparing the measured optical radiation at the different points in time to determine whether a leak exists.Type: GrantFiled: December 29, 2021Date of Patent: October 28, 2025Assignee: Inficon GMBHInventor: Daniel Wetzig
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Patent number: 12436058Abstract: The invention relates to a sniffer probe (10) for drawing in gas when searching for gas leaks, the sniffer probe having at least one sniffer tip (11), and an intake opening (16) being provided which is connected via a connecting line to a main sniffer line which can be connected to a gas leak detector. The sniffer tip (11) is provided in the region of the intake opening (16) with flexible elongated shielding elements (30) which project from the sniffer tip (11) in such a way that the intake opening (16) is shielded from the exterior environment (38) of the sniffer probe (10) on all sides.Type: GrantFiled: January 12, 2021Date of Patent: October 7, 2025Assignee: INFICON GMBHInventors: Jochen Puchalla-König, Erik Rolff, Silvio Decker
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Publication number: 20250244191Abstract: A test leak device has an interior surrounded by a housing that can be filled with a test fluid. The housing has a through-opening connecting the interior to the outer surroundings of the test leak device and a membrane that can be brought into or onto the through-opening. The membrane is permeable to the test fluid or to components of the test fluid. The membrane is part of a membrane element that seals the through-opening. The membrane element has a carrier element that is designed to be releasably fastened to the housing to close the through-opening when fastened so that the interior can be filled with test fluid through the through-opening. The carrier element also has an outlet duct that is sealed by the membrane, allowing only the test fluid or its components to escape through the membrane to the outside.Type: ApplicationFiled: April 12, 2023Publication date: July 31, 2025Applicant: INFICON GMBHInventors: Hendrik VAN TRIEST, Josef GRENZ, Daniel WETZIG
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Patent number: 12315892Abstract: A method for a tightness test of a test object filled with a liquid, said test object having an internal pressure which is lower than atmospheric pressure, comprising the following steps: inserting the test object into a test chamber, evacuating the test chamber to a pressure which is lower than the internal pressure inside the test object, drawing off the test chamber residual gas components together with gas components desorbing from a wall of the test chamber and parts of the liquid escaping from the test object through a leak in the latter without any carrier gas being fed to the test chamber from outside, transporting the drawn-off residual gas components together with the parts of the liquid escaped from the test object to a detector, and detecting parts of the liquid escaped through a leak in the test object by means of a detector.Type: GrantFiled: July 22, 2020Date of Patent: May 27, 2025Assignee: INFICON GmbHInventors: Maximilian Reismann, Daniel Wetzig
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Publication number: 20250058284Abstract: A vacuum leak detector has a housing enclosing a suction chamber, a vacuum pump evacuating the suction chamber, and a gas detector connected to the suction chamber. The housing has a test leak with a selectively gas-permeable membrane. The test leak connects the outer atmosphere of the housing with the suction chamber.Type: ApplicationFiled: December 22, 2022Publication date: February 20, 2025Applicant: INFICON GMBHInventors: Daniel WETZIG, Jochen PUCHALLA-KÖNIG, Silvio DECKER, Sebastian WEISS
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Publication number: 20250020535Abstract: A method for leak testing a test specimen includes the following steps: placing the test specimen in a test chamber, testing a leak-tightness of the test specimen in the test chamber, opening the test chamber and removing the test specimen if the leak test has determined that the test specimen is leak-tight, and blocking the test chamber from opening to prevent a removal of the test specimen if the leak test has determined a leak in the test specimen. A leak testing device includes a test chamber receiving the test specimen, a leak detector connected to the test chamber, and a blocking device.Type: ApplicationFiled: October 31, 2022Publication date: January 16, 2025Applicant: INFICON GmbHInventor: Stefan MEBUS
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Publication number: 20250020534Abstract: A gas-specific vacuum leak detector has a multi-stage vacuum pump and a gas-specific gas sensor. The gas sensor is an integral part of the vacuum pump and is thereby adapted to detect a specific gas within the vacuum pump.Type: ApplicationFiled: December 6, 2022Publication date: January 16, 2025Applicant: INFICON GMBHInventors: Carsten STRIETZEL, Ivan BOKANOVIC, Hjalmar BRUHNS