Patents Assigned to Inficon GmbH
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Patent number: 7030381Abstract: A method for detecting a test gas present at a measuring location, using an infrared gas analyzer having a cuvette, an infrared light source, an infrared detector, and two gas lines. A first gas line is adapted to take up a measuring gas at a measuring location that may contain a test gas to the cuvette. The second gas line is adapted to take up gas from the surroundings of the measuring location (i.e., reference gas), that may contain a test gas background that is to be taken into consideration when detecting the test gas taken up at the measuring location. To improve the sensitivity of the analyzer, only one cuvette and the measuring gas is taken up at the measuring location and the reference gas is fed to the cuvette such that each gas is alternately present therein.Type: GrantFiled: November 17, 2001Date of Patent: April 18, 2006Assignee: Inficon GmbHInventors: Ralf Kilian, Randolf Rolff, Gerhard Küster, Ralf Hirche
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Publication number: 20060034702Abstract: A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak detector and the backing pump, the test gas line being connected to the outlet area of the high-vacuum pump via a line section. In order to shorten the response time of the leak detector, the line and the backing pump are connected via separate connections to the outlet area of the high-vacuum pump.Type: ApplicationFiled: January 13, 2004Publication date: February 16, 2006Applicant: Inficon GmbHInventor: Thomas Bohm
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Publication number: 20050229786Abstract: The invention relates to a gas transmitter (1) with selective gas permeable surfaces (4), comprising a support disc (3), provided with a number of through openings (2), made from a semiconductor material, a membrane (5), covering the openings (2) in the support disc (3) which forms the selective gas permeable surfaces (4) and means for controlling the temperature of the membrane (5). According to the invention, the temperature control means may be simplified whereby the support disc (3) itself serves as a means for controlling the temperature of the membrane (5).Type: ApplicationFiled: November 14, 2002Publication date: October 20, 2005Applicant: Inficon gmbHInventor: Daniel Wetzig
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Patent number: 6945092Abstract: The invention relates to a method for operating a film leak indicator (1) comprising two films (5, 6), which are each tensioned inside a frame (3, 4) and which delimit a testing space (80) when a test piece (79) is introduced. In addition, said film leak indicator is equipped with two vacuum pumps (13, 20). According to the invention, the testing space (80) is firstly evacuated and the film leak indicator is switched over to a leak search mode after the evacuation is completed. In order to prevent the search for leaks from being impaired by fluctuating helium concentrations in the ambient air, the invention provides that, before starting the leak search process, the helium concentration of the ambient air is measured and this measurement is taken into account during subsequent leakage measurements.Type: GrantFiled: June 20, 2002Date of Patent: September 20, 2005Assignee: Inficon GmbHInventor: Rudi Widt
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Patent number: 6902774Abstract: A method of manufacturing a device includes activating a gas containing at least one of hydrogen and of nitrogen by a hollow cathode discharge and exposing a first surface of a first material to the activated gas, thereby generating at the first surface an enrichment of at least one of hydrogen and of nitrogen and applying a further treatment to the enriched surface.Type: GrantFiled: July 25, 2002Date of Patent: June 7, 2005Assignee: Inficon GmbHInventor: Guenther Nicolussi
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Patent number: 6732571Abstract: The invention relates to a film leak detector with two films (5, 6) each stretched in a frame (3, 4); in order to attain a simple and stable structuring, it is proposed that each of the frames (3, 4) is comprised of two synthetic material subframes between which the particular film (5, 6) is fastened.Type: GrantFiled: April 9, 2001Date of Patent: May 11, 2004Assignee: Inficon GmbHInventor: Rudolf Flosbach
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Publication number: 20040012942Abstract: A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.Type: ApplicationFiled: July 11, 2003Publication date: January 22, 2004Applicant: INFICON GmbHInventors: Per Bjoerkman, Ray Olsson
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Publication number: 20030233866Abstract: The invention relates to a method for operating a film leak indicator (1) comprising two films (5, 6), which are each tensioned inside a frame (3, 4) and which delimit a testing space (80) when a test piece (79) is introduced. In addition, said film leak indicator is equipped with two vacuum pumps (13, 20). According to the invention, the testing space (80) is firstly evacuated and the film leak indicator is switched over to a leak search mode after the evacuation is completed. In order to prevent the search for leaks from being impaired by fluctuating helium concentrations in the ambient air, the invention provides that, before starting the leak search process, the helium concentration of the ambient air is measured and this measurement is taken into account during subsequent leakage measurements.Type: ApplicationFiled: June 20, 2002Publication date: December 25, 2003Applicant: INFICON GMBHInventor: Rudi Widt
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Patent number: 6635875Abstract: The invention relates to an infrared gas analyser (1), especially for use as a gas detector for leak detection using a sampling probe. Said gas analyser comprises a vessel (test vessel 2), through which a test gas flows, and an infrared light source (4, 5, 42) which produces an infrared light that shines through the test vessel (2). The analyser further encompasses a detector (35) that facilitates measurement of the infrared light absorption in the test gas. The aim of the invention is to provide at low costs an analyser that is apt for every day use. To this end, a reference vessel (3) through which a reference gas flows is provided in addition to the test vessel (2) through which the test gas flows. A reference gas is sucked from the environment of the test gas suction area. The same or an additional light source (4, 5, 42) and the same detector (35) are allocated to said reference vessel.Type: GrantFiled: August 6, 2001Date of Patent: October 21, 2003Assignee: Inficon GmbHInventors: Werner Grosse Bley, Günter Voss, Ulrich Döbler, Thomas Böhm
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Patent number: 6634215Abstract: The invention relates to a method for the integral leak detection on test samples with relatively thin walls, in which the test sample (1) comprising the test gas is tested for leaks in a test chamber; in order to test whether or not test samples are properly filled with test gas, it is proposed that for checking the test gas concentration in the test samples (1), the test gas concentration in at least one of the test samples (1) is measured thereby that its wall (2) is provided with a leak (4), and that with this test sample (1) a leak detection process is carried out.Type: GrantFiled: April 9, 2001Date of Patent: October 21, 2003Assignee: Inficon GmbHInventors: Markus Nothhelfer, Rudi Widt
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Patent number: 6595040Abstract: A test leak unit (1) includes a supply of test gas, preferably helium, and an element (14) for determining leakage rates. The aim of the invention is to create a simple, robust and easily refilled test leak unit, especially for detecting packaging leaks. To this end, the test gas supply is stored under substantially atmospheric pressure in a resealable reservoir (2) including a closing part (3), such that when the reservoir (2) is closed, a test gas-impermeable seal is developed between the closing part (3) and the reservoir (2), and the leakage rate-determining element (14) forms part of the closing part (3).Type: GrantFiled: June 29, 2001Date of Patent: July 22, 2003Assignee: Inficon GmbHInventors: Rudi Widt, Rudolf Flosbach
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Patent number: 6591687Abstract: A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.Type: GrantFiled: December 22, 1998Date of Patent: July 15, 2003Assignee: Inficon GmbHInventors: Per Bjoerkman, Ray Olsson
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Patent number: 6584829Abstract: A method for operating a film leak detector (1) which includes two films (5, 6) each stretched in a frame (3, 4), which, with a test sample (79) emplaced, delimit a test chamber (80). The detector is equipped with two vacuum pumps (13, 30), in which first the test chamber (80) is evacuated and, after the evacuation operation, a leak detection operation takes place. In order to avoid test gas pollution and impurities during the first phase of the evacuation of the test chamber (80), only one (13) of the two vacuum pumps is operated and during the leak detection operation only the second vacuum pump (30) is operated.Type: GrantFiled: April 9, 2001Date of Patent: July 1, 2003Assignee: Inficon GmbHInventors: Rudolf Flosbach, Rudi Widt
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Publication number: 20030118802Abstract: A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 &mgr;m, in particular less than 120 &mgr;m. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.Type: ApplicationFiled: February 7, 2003Publication date: June 26, 2003Applicant: INFICON GmbHInventor: Per Bjoerkman
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Patent number: 6550313Abstract: The invention relates to a test gas leakage detection apparatus (1) comprising a test chamber (2) and supply and measuring devices such as fore-pumps and high-vacuum pumps, test gas detectors, electronic components, etc. In order to construct an apparatus of this type in a manner which is simple and which does not restrict mobility, the invention provides that the test chamber (2) and the supply and measuring devices are combined to form a modular unit, and that the test chamber (2) is supported on a housing (3) in which the supply and measuring devices are accommodated. In addition, air cooling devices are assigned to thermally critical components of the supply and measuring devices.Type: GrantFiled: June 26, 2001Date of Patent: April 22, 2003Assignee: Inficon GmbHInventor: Rudolf Flosbach
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Publication number: 20030047465Abstract: The invention relates to a method and a device for detecting leaks in the wall of a test object, container or similar, by measuring and evaluating changes that occur in a partial gas pressure. The invention aims to simplify the detection of leaks. To this end, changes that occur in partial pressures of oxygen are detected and evaluated using an oxygen sensor (4).Type: ApplicationFiled: June 20, 2002Publication date: March 13, 2003Applicant: INFICON GMBHInventor: Werner Grosse Bley
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Patent number: 6528008Abstract: A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 &mgr;m, in particular less than 120 &mgr;m. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.Type: GrantFiled: December 22, 1998Date of Patent: March 4, 2003Assignee: Inficon GmbHInventor: Per Bjoerkman