Patents Assigned to Inficon GmbH
  • Patent number: 7030381
    Abstract: A method for detecting a test gas present at a measuring location, using an infrared gas analyzer having a cuvette, an infrared light source, an infrared detector, and two gas lines. A first gas line is adapted to take up a measuring gas at a measuring location that may contain a test gas to the cuvette. The second gas line is adapted to take up gas from the surroundings of the measuring location (i.e., reference gas), that may contain a test gas background that is to be taken into consideration when detecting the test gas taken up at the measuring location. To improve the sensitivity of the analyzer, only one cuvette and the measuring gas is taken up at the measuring location and the reference gas is fed to the cuvette such that each gas is alternately present therein.
    Type: Grant
    Filed: November 17, 2001
    Date of Patent: April 18, 2006
    Assignee: Inficon GmbH
    Inventors: Ralf Kilian, Randolf Rolff, Gerhard Küster, Ralf Hirche
  • Publication number: 20060034702
    Abstract: A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak detector and the backing pump, the test gas line being connected to the outlet area of the high-vacuum pump via a line section. In order to shorten the response time of the leak detector, the line and the backing pump are connected via separate connections to the outlet area of the high-vacuum pump.
    Type: Application
    Filed: January 13, 2004
    Publication date: February 16, 2006
    Applicant: Inficon GmbH
    Inventor: Thomas Bohm
  • Publication number: 20050229786
    Abstract: The invention relates to a gas transmitter (1) with selective gas permeable surfaces (4), comprising a support disc (3), provided with a number of through openings (2), made from a semiconductor material, a membrane (5), covering the openings (2) in the support disc (3) which forms the selective gas permeable surfaces (4) and means for controlling the temperature of the membrane (5). According to the invention, the temperature control means may be simplified whereby the support disc (3) itself serves as a means for controlling the temperature of the membrane (5).
    Type: Application
    Filed: November 14, 2002
    Publication date: October 20, 2005
    Applicant: Inficon gmbH
    Inventor: Daniel Wetzig
  • Patent number: 6945092
    Abstract: The invention relates to a method for operating a film leak indicator (1) comprising two films (5, 6), which are each tensioned inside a frame (3, 4) and which delimit a testing space (80) when a test piece (79) is introduced. In addition, said film leak indicator is equipped with two vacuum pumps (13, 20). According to the invention, the testing space (80) is firstly evacuated and the film leak indicator is switched over to a leak search mode after the evacuation is completed. In order to prevent the search for leaks from being impaired by fluctuating helium concentrations in the ambient air, the invention provides that, before starting the leak search process, the helium concentration of the ambient air is measured and this measurement is taken into account during subsequent leakage measurements.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: September 20, 2005
    Assignee: Inficon GmbH
    Inventor: Rudi Widt
  • Patent number: 6902774
    Abstract: A method of manufacturing a device includes activating a gas containing at least one of hydrogen and of nitrogen by a hollow cathode discharge and exposing a first surface of a first material to the activated gas, thereby generating at the first surface an enrichment of at least one of hydrogen and of nitrogen and applying a further treatment to the enriched surface.
    Type: Grant
    Filed: July 25, 2002
    Date of Patent: June 7, 2005
    Assignee: Inficon GmbH
    Inventor: Guenther Nicolussi
  • Patent number: 6732571
    Abstract: The invention relates to a film leak detector with two films (5, 6) each stretched in a frame (3, 4); in order to attain a simple and stable structuring, it is proposed that each of the frames (3, 4) is comprised of two synthetic material subframes between which the particular film (5, 6) is fastened.
    Type: Grant
    Filed: April 9, 2001
    Date of Patent: May 11, 2004
    Assignee: Inficon GmbH
    Inventor: Rudolf Flosbach
  • Publication number: 20040012942
    Abstract: A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.
    Type: Application
    Filed: July 11, 2003
    Publication date: January 22, 2004
    Applicant: INFICON GmbH
    Inventors: Per Bjoerkman, Ray Olsson
  • Publication number: 20030233866
    Abstract: The invention relates to a method for operating a film leak indicator (1) comprising two films (5, 6), which are each tensioned inside a frame (3, 4) and which delimit a testing space (80) when a test piece (79) is introduced. In addition, said film leak indicator is equipped with two vacuum pumps (13, 20). According to the invention, the testing space (80) is firstly evacuated and the film leak indicator is switched over to a leak search mode after the evacuation is completed. In order to prevent the search for leaks from being impaired by fluctuating helium concentrations in the ambient air, the invention provides that, before starting the leak search process, the helium concentration of the ambient air is measured and this measurement is taken into account during subsequent leakage measurements.
    Type: Application
    Filed: June 20, 2002
    Publication date: December 25, 2003
    Applicant: INFICON GMBH
    Inventor: Rudi Widt
  • Patent number: 6635875
    Abstract: The invention relates to an infrared gas analyser (1), especially for use as a gas detector for leak detection using a sampling probe. Said gas analyser comprises a vessel (test vessel 2), through which a test gas flows, and an infrared light source (4, 5, 42) which produces an infrared light that shines through the test vessel (2). The analyser further encompasses a detector (35) that facilitates measurement of the infrared light absorption in the test gas. The aim of the invention is to provide at low costs an analyser that is apt for every day use. To this end, a reference vessel (3) through which a reference gas flows is provided in addition to the test vessel (2) through which the test gas flows. A reference gas is sucked from the environment of the test gas suction area. The same or an additional light source (4, 5, 42) and the same detector (35) are allocated to said reference vessel.
    Type: Grant
    Filed: August 6, 2001
    Date of Patent: October 21, 2003
    Assignee: Inficon GmbH
    Inventors: Werner Grosse Bley, Günter Voss, Ulrich Döbler, Thomas Böhm
  • Patent number: 6634215
    Abstract: The invention relates to a method for the integral leak detection on test samples with relatively thin walls, in which the test sample (1) comprising the test gas is tested for leaks in a test chamber; in order to test whether or not test samples are properly filled with test gas, it is proposed that for checking the test gas concentration in the test samples (1), the test gas concentration in at least one of the test samples (1) is measured thereby that its wall (2) is provided with a leak (4), and that with this test sample (1) a leak detection process is carried out.
    Type: Grant
    Filed: April 9, 2001
    Date of Patent: October 21, 2003
    Assignee: Inficon GmbH
    Inventors: Markus Nothhelfer, Rudi Widt
  • Patent number: 6595040
    Abstract: A test leak unit (1) includes a supply of test gas, preferably helium, and an element (14) for determining leakage rates. The aim of the invention is to create a simple, robust and easily refilled test leak unit, especially for detecting packaging leaks. To this end, the test gas supply is stored under substantially atmospheric pressure in a resealable reservoir (2) including a closing part (3), such that when the reservoir (2) is closed, a test gas-impermeable seal is developed between the closing part (3) and the reservoir (2), and the leakage rate-determining element (14) forms part of the closing part (3).
    Type: Grant
    Filed: June 29, 2001
    Date of Patent: July 22, 2003
    Assignee: Inficon GmbH
    Inventors: Rudi Widt, Rudolf Flosbach
  • Patent number: 6591687
    Abstract: A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.
    Type: Grant
    Filed: December 22, 1998
    Date of Patent: July 15, 2003
    Assignee: Inficon GmbH
    Inventors: Per Bjoerkman, Ray Olsson
  • Patent number: 6584829
    Abstract: A method for operating a film leak detector (1) which includes two films (5, 6) each stretched in a frame (3, 4), which, with a test sample (79) emplaced, delimit a test chamber (80). The detector is equipped with two vacuum pumps (13, 30), in which first the test chamber (80) is evacuated and, after the evacuation operation, a leak detection operation takes place. In order to avoid test gas pollution and impurities during the first phase of the evacuation of the test chamber (80), only one (13) of the two vacuum pumps is operated and during the leak detection operation only the second vacuum pump (30) is operated.
    Type: Grant
    Filed: April 9, 2001
    Date of Patent: July 1, 2003
    Assignee: Inficon GmbH
    Inventors: Rudolf Flosbach, Rudi Widt
  • Publication number: 20030118802
    Abstract: A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 &mgr;m, in particular less than 120 &mgr;m. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.
    Type: Application
    Filed: February 7, 2003
    Publication date: June 26, 2003
    Applicant: INFICON GmbH
    Inventor: Per Bjoerkman
  • Patent number: 6550313
    Abstract: The invention relates to a test gas leakage detection apparatus (1) comprising a test chamber (2) and supply and measuring devices such as fore-pumps and high-vacuum pumps, test gas detectors, electronic components, etc. In order to construct an apparatus of this type in a manner which is simple and which does not restrict mobility, the invention provides that the test chamber (2) and the supply and measuring devices are combined to form a modular unit, and that the test chamber (2) is supported on a housing (3) in which the supply and measuring devices are accommodated. In addition, air cooling devices are assigned to thermally critical components of the supply and measuring devices.
    Type: Grant
    Filed: June 26, 2001
    Date of Patent: April 22, 2003
    Assignee: Inficon GmbH
    Inventor: Rudolf Flosbach
  • Publication number: 20030047465
    Abstract: The invention relates to a method and a device for detecting leaks in the wall of a test object, container or similar, by measuring and evaluating changes that occur in a partial gas pressure. The invention aims to simplify the detection of leaks. To this end, changes that occur in partial pressures of oxygen are detected and evaluated using an oxygen sensor (4).
    Type: Application
    Filed: June 20, 2002
    Publication date: March 13, 2003
    Applicant: INFICON GMBH
    Inventor: Werner Grosse Bley
  • Patent number: 6528008
    Abstract: A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 &mgr;m, in particular less than 120 &mgr;m. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.
    Type: Grant
    Filed: December 22, 1998
    Date of Patent: March 4, 2003
    Assignee: Inficon GmbH
    Inventor: Per Bjoerkman