Patents Assigned to Inficon, LLC
  • Throttling Element Particle Detector
    Publication number: 20240159641
    Abstract: A particle detector includes at least one throttling element which defines an aerodynamic aperture. A light source illuminates a region of the aerodynamic aperture at about a focal point of an aerodynamic lens. A detector is configured to receive a light scattered from one or more particles which traverse the aerodynamic aperture. A method for detecting and measuring particles previously deposited on a surface of a semiconductor manufacturing chamber is also described.
    Type: Application
    Filed: November 14, 2023
    Publication date: May 16, 2024
    Applicant: Inficon, LLC
    Inventors: Shawn Briglin, Nathan Graff, Silvio Decker, Michael Haggmark