Abstract: An electronic device including: a semiconductor substrate having an array of gate conductors, each having a length and a width, comprised of dummy gate conductors and functional gate conductors extending in a widthwise direction, the gate conductors positioned substantially parallel to each other in the widthwise direction and periodically spaced apart a fixed distance in a direction substantially perpendicular to the widthwise direction.
Type:
Application
Filed:
June 26, 2003
Publication date:
January 13, 2005
Applicants:
INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON NORTH AMERICA CORP
Abstract: A process for forming a DRAM in a silicon chip that includes N-MOSFETs of the memory cells in its central area and C-MOSFETs of the support circuitry in the peripheral area. By the inclusion of a masking oxide layer over the peripheral area during the formation of the memory cells, there are formed N-MOSFETs that use N-doped polycide gates and P-MOSFETs that use P-doped polycide gates. The sources and drains include self-aligned silicide contacts.