Patents Assigned to Infinitesima Ltd.
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Patent number: 9052340Abstract: A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.Type: GrantFiled: March 29, 2011Date of Patent: June 9, 2015Assignee: INFINITESIMA LTDInventor: Andrew Humphris
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Patent number: 8910311Abstract: A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.Type: GrantFiled: October 31, 2007Date of Patent: December 9, 2014Assignee: Infinitesima Ltd.Inventors: Andrew Humphris, David Catto
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Patent number: 8732861Abstract: A control system 32, 75 is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system 34 that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.Type: GrantFiled: October 19, 2012Date of Patent: May 20, 2014Assignee: Infinitesima Ltd.Inventors: Andrew Humphris, David Catto
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Patent number: 8528110Abstract: A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.Type: GrantFiled: June 8, 2009Date of Patent: September 3, 2013Assignee: Infinitesima Ltd.Inventor: Andrew Humphris
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Patent number: 8479310Abstract: A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.Type: GrantFiled: December 11, 2009Date of Patent: July 2, 2013Assignee: Infinitesima Ltd.Inventor: Andrew Humphris
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Publication number: 20130042375Abstract: A control system 32, 75 is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system 34 that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.Type: ApplicationFiled: October 19, 2012Publication date: February 14, 2013Applicant: INFINITESIMA LTDInventor: Infinitesima Ltd
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Publication number: 20130014296Abstract: A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.Type: ApplicationFiled: March 29, 2011Publication date: January 10, 2013Applicant: INFINITESIMA LTDInventor: Andrew Humphris
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Patent number: 8296856Abstract: A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.Type: GrantFiled: February 4, 2010Date of Patent: October 23, 2012Assignee: Infinitesima Ltd.Inventors: Andrew Humphris, David Catto
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Patent number: 8220066Abstract: A The local probe microscopy apparatus (1) comprises a probe (3) with translation stages (5a, 5b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.Type: GrantFiled: August 4, 2008Date of Patent: July 10, 2012Assignee: Infinitesima Ltd.Inventor: Andrew Humphris
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Publication number: 20110296561Abstract: A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.Type: ApplicationFiled: February 4, 2010Publication date: December 1, 2011Applicant: INFINITESIMA LTDInventors: Andrew Humphris, David Catto
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Publication number: 20110247106Abstract: A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.Type: ApplicationFiled: December 11, 2009Publication date: October 6, 2011Applicant: INFINITESIMA LTDInventor: Andrew Humphris
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Publication number: 20110167525Abstract: A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.Type: ApplicationFiled: June 8, 2009Publication date: July 7, 2011Applicant: INFINITESIMA LTDInventor: Andrew Humphris
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Publication number: 20110138506Abstract: A method of probe alignment is described in which an interrogating light beam is aligned with the probe of a scanning probe microscope. The methods described ensure that the light beam is positioned as closely as possible to a point directly above the probe tip. This improves image quality by removing variations that may arise if cantilever deflection is allowed to vary during the course of a scan and/or if scanning at high scanning speeds that may excite transient motion of the probe.Type: ApplicationFiled: June 8, 2009Publication date: June 9, 2011Applicant: INFINITESIMA LTDInventor: Andrew Humphris
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Publication number: 20100235955Abstract: A The local probe microscopy apparatus (1) comprises a probe (3) with translation stages (5a, 5b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.Type: ApplicationFiled: August 4, 2008Publication date: September 16, 2010Applicant: INFINITESIMA LTDInventor: Andrew Humphris
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Publication number: 20100186132Abstract: A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.Type: ApplicationFiled: October 31, 2007Publication date: July 22, 2010Applicant: INFINITESIMA LTDInventors: Andrew Humphris, David Catto