Abstract: In an ultrasonic transducer unit comprising a plurality of ultrasonic transducers, each of the ultrasonic transducers is provided with a recess formed in one face of an insulating substrate, and a substrate-side electrode is buried in a bottom of the recess, and a vibrating membrane is formed so as to cover the recess.
Abstract: In an ultrasonic transducer unit comprising a plurality of ultrasonic transducers, each of the ultrasonic transducers is provided with a recess formed in one face of an insulating substrate, and a substrate-side electrode is buried in a bottom of the recess, and a vibrating membrane is formed so as to cover the recess.