Patents Assigned to Inorgtech Limited
  • Metalorganic chemical vapor deposition precursors
    Patent number: 6248928
    Abstract: A method of manufacturing a strontium &bgr;-diketonate precursor suitable for MOCVD techniques comprises the step of reacting strontium with a sterically hindered alcohol to produce strontium alkoxide, subsequently reacting the strontium alkoxide with a &bgr;-diketone to form a strontium &bgr;-diketonate alcohol adduct and removing the alcohol from the adduct.
    Type: Grant
    Filed: July 21, 2000
    Date of Patent: June 19, 2001
    Assignee: Inorgtech Limited
    Inventor: Anthony Copeland Jones