Patents Assigned to Inpod, Inc.
  • Microelectromechanical machined array valve
    Patent number: 5927325
    Abstract: A valve to allow digitally addressable flow controllers is provided. An array of micromachined valves having a range of flow capacities and individually addressable while functioning in an On/Off mode allows flow controllers and similar devices high resolution, linearity and reproducibility. The incorporation of diamond or diamond-like materials in all flow paths extends the application of the valves to corrosive materials and permits higher process temperatures and lower particulate generation.
    Type: Grant
    Filed: October 25, 1996
    Date of Patent: July 27, 1999
    Assignee: Inpod, Inc.
    Inventors: Abdelhak Bensaoula, John Gregory Hollingshead, Lawrence Frank Latham, Jr.