Patents Assigned to INSIGHTECH, LLC
  • WAFER BONDING METHOD FOR USE IN MAKING A MEMS GYROSCOPE
    Publication number: 20160154070
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a proof-mass. The magnetic sensor wafer and MEMS wafer are bonded through a bonding mechanism that comprises a hearting mechanism.
    Type: Application
    Filed: October 13, 2014
    Publication date: June 2, 2016
    Applicant: INSIGHTECH, LLC
    Inventors: Biao Zhang, Tao Ju
  • MEMS GYROSCOPE
    Publication number: 20160154019
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprises a movable portion capable of moving in response to angular velocity, a conducting wire attached to the movable portion for generating magnetic field, and a spintronic device for measuring the magnetic field. The conducting wire is disposed such that the current it carries is substantially perpendicular to the sensing direction of the sensing mode of the proof-mass.
    Type: Application
    Filed: October 20, 2014
    Publication date: June 2, 2016
    Applicant: InSighTech, LLC
    Inventors: Biao Zhang, Tao Ju
  • MEMS GYROSCOPE
    Publication number: 20160154020
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass, wherein the magnetic sensing mechanism comprises an integrated pickup coil of a fluxgate. A magnetic shield is provided in the vicinity of the magnetic source.
    Type: Application
    Filed: October 20, 2014
    Publication date: June 2, 2016
    Applicant: INSIGHTECH, LLC
    Inventors: Biao Zhang, Tao Ju
  • MEMS GYROSCOPE
    Publication number: 20160153780
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprises a movable portion capable of moving in response to angular velocity, a conducting wire attached to the movable portion for generating magnetic field, and a spintronic device for measuring the magnetic field. The easy axis of the spintronic device is aligned to the sensing mode of the movable portion and to the direction of the current flowing through the conducting wire.
    Type: Application
    Filed: October 20, 2014
    Publication date: June 2, 2016
    Applicant: InSighTech, LLC
    Inventors: Biao Zhang, Tao Ju
  • MEMS GYROSCOPE
    Publication number: 20150226555
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism is disposed at a location wherein the magnetic field gradient from the magnetic source is maximum.
    Type: Application
    Filed: February 11, 2014
    Publication date: August 13, 2015
    Applicant: InSighTech, LLC
    Inventors: Biao Zhang, Tao Ju
  • MEMS GYROSCOPE
    Publication number: 20150033853
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions.
    Type: Application
    Filed: October 20, 2014
    Publication date: February 5, 2015
    Applicant: INSIGHTECH, LLC
    Inventors: Biao Zhang, TAO JU
  • MEMS DEVICE
    Publication number: 20150033855
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.
    Type: Application
    Filed: October 20, 2014
    Publication date: February 5, 2015
    Applicant: INSIGHTECH, LLC
    Inventors: Biao ZHANG, Tao JU
  • WAFER BONDING METHOD FOR USE IN MAKING A MEMS GYROSCOPE
    Publication number: 20150034620
    Abstract: A method of making a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a proof-mass.
    Type: Application
    Filed: October 20, 2014
    Publication date: February 5, 2015
    Applicant: INSIGHTECH, LLC
    Inventors: BIAO ZHANG, TAO JU
  • MEMS GYROSCOPE
    Publication number: 20150033856
    Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a driving mechanism, a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass. The MEMS gyroscope is enclosed in a package that further comprises a magnet for providing bias magnetic field.
    Type: Application
    Filed: October 20, 2014
    Publication date: February 5, 2015
    Applicant: INSIGHTECH, LLC
    Inventors: BIAO ZHANG, TAO JU