Abstract: The surface recombination velocity of a silicon sample is reduced by deposition of a thin hydrogenated amorphous silicon or hydrogenated amorphous silicon carbide film, followed by deposition of a thin hydrogenated silicon nitride film. The surface recombination velocity is further decreased by a subsequent anneal. Silicon solar cell structures using this new method for efficient reduction of the surface recombination velocity is claimed.
Type:
Grant
Filed:
April 12, 2006
Date of Patent:
December 23, 2014
Assignees:
Rec Solar Pte. Ltd., Universitetet I Oslo, Instititt for Energiteknikk
Inventors:
Alexander Ulyashin, Andreas Bentzen, Bengt Svensson, Arve Holt, Erik Sauar