Patents Assigned to Institut de Microtechnique de l'Universite de Neuchatel
  • Actuating and sensing device for scanning probe microscopes
    Patent number: 7051582
    Abstract: An actuating and sensing device for scanning probe microscopes includes a tuning fork (21) containing two prongs, a connection device (23) such as a spring, and a probing tip (22). The tip (22) is connected to both prongs of the tuning fork (21) with the connection device (23). The tuning fork (21) is used as a mechanical resonator to vibrate. The movements of the prongs are transformed via the connection device (23) into movements of the tip (22), wherein the tip movements can be in different planes than the movement plane of the prongs.
    Type: Grant
    Filed: April 15, 2002
    Date of Patent: May 30, 2006
    Assignee: Institut de Microtechnique de l'Universite de Neuchatel
    Inventor: Terunobu Akiyama