Patents Assigned to INSTITUT FÜR NANOPHOTONIK GÖTTINGEN E.V.
  • Patent number: 11059127
    Abstract: The invention relates to an ablative production device and method for a periodic line structure on a workpiece. The device comprises a pulsed laser for generating ablative light, a phase mask arranged in the beam path of the ablative light, imaging optics arranged on an optical axis and a holder to hold the workpiece in an image plane. The phase mask produces a plurality of equidistant parallel lines in an object plane by interference and suppresses an order of diffraction parallel to the optical axis. The optical axis is perpendicular to the object plane. The imaging optics comprises a cylindrical lens, which is aligned in parallel to the lines and is designed to image the object plane into the image plane.
    Type: Grant
    Filed: August 25, 2016
    Date of Patent: July 13, 2021
    Assignee: INSTITUT FÜR NANOPHOTONIK GÖTTINGEN E.V.
    Inventors: Juergen Ihlemann, Joerg Meinertz, Lars Henning Stark