Patents Assigned to INSTITUT FUER AKUSTOMIKROSKOPIE DR. KRAEMER GMBH
  • METHOD AND APPARATUS FOR NON-DESTRUCTIVE DETECTION OF DEFECTS IN THE INTERIOR OF SEMICONDUCTOR MATERIAL
    Publication number: 20110061465
    Abstract: A method and an apparatus for the non-destructive detection of defects in the interior of semiconductor material (2) are disclosed. The semiconductor material (2) has a length (L), a cross-sectional area (Q), and a side surface (5) aligned with the length (L). An ultrasonic apparatus (10) is assigned to the semiconductor material (2). Furthermore a set-up (9) for generating a relative motion between the ultrasonic apparatus (10) and along the length (L) of the side surface (5) of the semiconductor material (2) is provided.
    Type: Application
    Filed: October 18, 2010
    Publication date: March 17, 2011
    Applicant: INSTITUT FUER AKUSTOMIKROSKOPIE DR. KRAEMER GMBH
    Inventor: Klaus KRAEMER