Patents Assigned to Institut fuer Halbleiterphysik Frankfurt (Oder) GmbH.
  • Patent number: 6740560
    Abstract: The aim of the invention is to provide for a bipolar transistor and a method for producing the same. Said bipolar transistor should have minimal base-emitter capacities and very good high frequency characteristics. The static characteristics, especially the base current ideality and the low frequency noise, of a bipolar transistor with weakly doped cap layer (116) should not significantly deteriorate and process complexity should not increase. According to the invention, the problem is solved by inserting a special doping profile in a cap layer (116) (cap doping) which has been produced epitaxially. A minimal base emitter capacity and very good high frequency characteristics can be obtained by means of said doping profile. At the same time, the efficiency of the generation/recombination active boundary surface between the cap layer (116) and the isolator (117) in the polysilicon overlapping area in the relevant working area of the transistor is reduced and the base current ideality is improved.
    Type: Grant
    Filed: September 17, 2001
    Date of Patent: May 25, 2004
    Assignee: Institut fuer Halbleiterphysik Frankfurt (Oder) GmbH
    Inventors: Bernd Heinemann, Karl-Ernst Ehwald, Dieter Knoll
  • Patent number: 6642553
    Abstract: The invention relates to a bipolar transistor and a method for producing same. The aim of the invention is to provide a bipolar transistor and a method for producing same, which during the use of a single-process poly-silicon technology with differential epitaxis for the production of bases overcomes the disadvantages of conventional systems, so as notably further to improve the high-speed properties of a bipolar transistor, provide the most conductive connections possible between the metal contacts and the active (internal) transistor region as well as a minimized passive transistor surface, while at the same time avoiding greater process complexity and increased contact resistances. To this end a surface relief is produced in the active emitter region by a wet-chemical process. A single-process poly-silicon bipolar transistor having a base produced by epitaxis in accordance with the invention permits a reduction in external base resistance without causing a deterioration in emitter properties.
    Type: Grant
    Filed: March 22, 2001
    Date of Patent: November 4, 2003
    Assignee: Institut fuer Halbleiterphysik Frankfurt (Oder) GmbH.
    Inventors: Juergen Drews, Bernd Tillack, Bernd Heinemann, Dieter Knoll
  • Patent number: 6627972
    Abstract: The invention relates to a vertical bipolar transistor and a method for the production thereof. The aim of the invention is to produce a vertical bipolar transistor and to disclose a method for the production thereof, whereby excellent high frequency properties can be obtained for said transistor using the simplest possible production technology involving an implanted epitaxy-free collector and only one polysilicon layer spread over a large surface and which can be easily integrated into a conventional mainstream CMOS process without epitaxially produced trough areas.
    Type: Grant
    Filed: March 7, 2001
    Date of Patent: September 30, 2003
    Assignee: Institut fuer Halbleiterphysik Frankfurt (Oder) GmbH
    Inventors: Karl-Ernst Ehwald, Dieter Knoll, Bernd Heinemann
  • Patent number: 6593782
    Abstract: The invention is a static frequency divider with a divider ratio which can be switched over, tor use in the extremely high frequency range. In a preferred embodiment, the invention is a static frequency divider with a divider ratio which can be switched over, which includes first and second divider D- type flip-flops which each have two inputs which can be alternately activated by way of control inputs, in order to prevent the occurrence of metastable conditions. This is accomplished by connecting the successive synchronous D-type flip-flops upstream of the two divider D-type flip- flops and the control inputs of the first and second divider D-type flip-flops are connected to separate change-over switching devices.
    Type: Grant
    Filed: March 13, 2001
    Date of Patent: July 15, 2003
    Assignee: Institut fuer Halbleiterphysik Frankfurt (Oder) GmbH
    Inventors: Michael Pierschel, Hans Gustat
  • Patent number: 6358823
    Abstract: A method of fabricating ion implanted doping layers in semiconductor materials by subjecting the material to an ultrasonic treatment during the implantation of predetermined impurities. In an alternate embodiment ultrasonic vibrations are generated by primary ion currents of sufficient density reflected by a piezo-electric element applied to the semiconductor material.
    Type: Grant
    Filed: April 12, 2000
    Date of Patent: March 19, 2002
    Assignee: Institut fuer Halbleiterphysik Frankfurt (Oder) GmbH.
    Inventors: Dietmar Krueger, Rainer Kurps, Boris Romanjuk, Viktor Melnik, Jaroslav Olich