Abstract: Described is a sensor based on the magnetoresistive effect and integrated into the thin-film arrangement of a remagnetization line in the form of a meander. In an adaptation to this meandering structure, the magnetoresistive film strips are provided in regions with alternating positive- and negative-inclined Barber pole structures. When periodic remagnetization of the regions takes place, a drift-free AC voltage is obtained as a sensor output signal. This lack of drift is the presupposition for the use of the magnetic field sensor for precise measurement of weak magnetic fields.
Type:
Grant
Filed:
January 31, 1995
Date of Patent:
May 28, 1996
Assignee:
Institut fuer Mikrostrukturtechnologie und Optoelektronik e.V.