Abstract: The invention relates to a flat coil and to a lthographic method for producing microcomponents with metal component sources in the sub-millimeter range. According to the inventive method, a resist material is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resist structures with metal by means of a galvanic method to produe the metal component structures. The aim of the invention is to improve such a method so that the microcomponents can be subdivided during said process. To this end, a structured three-dimensional sacrificial metal layer is produced during the production of the microcomponent, said sacrificial layer delimiting the microcomponent and being removed once the microcomponent is due to be subdivided.

Abstract: Known static micromixers that work according to the principle of multilamination allow for a rapid mixing by diffusion. The invention provides a means for substantially increasing the throughput of known micromixers. To this end, the inventive micromixer for mixing two or more reactants comprises microstructures that define mixer cells. Each of said mixer cells is provided with a feeding chamber which adjoins at least two groups of digital channels. Said channels intermesh with the digital channels of the groups adjoining the feeding channels in a comb-like manner, thereby producing mixing zones]. Outlet ports are located above said mixing zones, said outlet ports extending perpendicularly to the digital channels and discharging the product. The inventive micromixer is especially useful for the large-scale production of mixtures, dispersions and emulsions.

Abstract: Disclosed is a method for assembling cassette-loaded microcomponents, requiring only a small number of component-specific ejector tools and capable of being implemented more quickly. According to the inventive method, at least two cassettes provided with component carriers are used, whereby each cassette has at least one type of component and the positions of the components are adapted to each other. At least one cassette acts as a base plate cassette wherein the microcomponents are arranged on a base plate acting as a component carrier. At least one joint assembly step is carried out, wherein two cassettes are respectively placed opposite each other and all microcomponents in the joined cassettes are simultaneously assembled to form sub-assemblies or component units. The component carriers of the cassettes are subsequently withdrawn. During assembly, the microcomponents can also be held in a rotationally secure position.

Abstract: The invention relates to a procedure and a micromixer for mixing at least two fluids. The aim of the invention is to reduce the mixing time of the micromixer compared to micromixers known to the art while maintaining high mixing quality and small structural dimensions. The inventive procedure is characterized by the following steps: a plurality of separated fluid currents of both fluids are brought together and alternately adjacent fluid lamellae of both fluids are formed: the combined fluid currents are carried away and a focused total fluid current is formed; the focused total fluid current is fed as fluid jet into an expansion chamber; and the resulting mixture is drawn off. The micromixer comprises a plurality of alternately adjacent fluid channels which open into an inlet chamber. A focusing channel is in fluid connection with said inlet chamber and opens into an expansion chamber.

Abstract: The object of the invention is to produce multipole magnetic systems that are composed of a plurality of individual magnetic components that preferably are made of rare-earth magnetic material. The invention relates to a method for producing and magazining at least one individual magnetic component, a magazine for at least one individual magnetic component by molding and for conventionally magnetizing the same. The invention further relates to a method of assembly for producing a magnetic system and to the resulting magnetic systems. The invention teaches that extremely flat multipole magnetic systems in the form of magnet rings or magnet strips and three-dimensional magnet bodies such as a magnetic scale, for example, can be produced by means of individual magnetic components that are directly adjacent to each other or are arranged at a distance by means of a molding material, for example.

Abstract: Disclosed is a method to simplify the handling of micro-components, wherein a micro-component is initially produced on a micro-component base plate. At least the open side surfaces of the micro-component are then cast using a hardening molding material whereupon the base plate and/or the molding material covering the micro-component is removed. The magazine for at least one micro-component comprises of a disk-shaped plate encompassing the micro-component at least one its lateral surfaces is positive joint. The assembly method for micro-components includes a magazine which is configured in the form of a disk-shaped plate containing at least one micro-component which encompasses at least on one of its sides in positive fit. Said magazine is held and maintained by a retaining device, whereupon the micro-component which is to be assembled is squeezed out of the magazine and simultaneously positioned in a specific location.

Abstract: The invention relates to a method of waterproofing the surface of a polymer work piece. The aim of the invention is to prevent liquid or gaseous, hydroxyl-group (OH group) containing substances, such as water, vapor or glycerol, from diffusing into a polymer surface. To this end, the work piece is treated with at least one organic solvent that blisters the surface of the polymer work piece, thereby diffusing at least one waterproofing agent dissolved in the solvent into the surface of the polymer work piece, said waterproofing agent being a silicon-organic compound. The solvent is allowed to react and is then removed from the polymer work piece, whereby at least a part of the waterproofing agent remains bound in the surface of the polymer work piece.

Abstract: The invention relates to a lithographic method for producing microcomponents with component structures in the submillimeter range. According to the inventive method, a structured adhesive layer is applied to a metal layer and then a photostructured epoxy resin layer is applied to said adhesive layer. Said epoxide resin is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resin structures with metal by electroplating. The aim of the invention is to provide an adhesive layer that is suitable for photostructured epoxy resins, especially for SU-8 resist material and that prevents the resist material from being detached. To this end, the adhesive layer consists of polyimide or a polyimide mixture.

Abstract: Disclosed is a method to simplify the handling of micro-components (1, 18), wherein a micro-component (1, 18) is initially produced on a micro-component base plate (2). At least the open side surfaces of the micro-component (1, 18) are then cast using a hardening moulding material (4) whereupon the base plate (2) and/or the moulding material (4) covering the micro-component (1, 18) is removed. The magazine (5) for at least one micro-component (1, 18) comprises of a disk-shaped plate (5a) encompassing the micro-component (1,18) at least one its side surfaces (1c) is positive fit. The assembly method for micro-components (1, 18) includes a magazine (5) which is configured in the form of a disk-shaped plate containing at least one micro-component (1, 18) which encompasses at least on one of its sides in positive fit.

Abstract: Reactor for carrying out electrochemical reactions with an electrode and a counter-electrode are known, whereby the electrodes are separated form one another by a capillary gap. Such reactors do not comprise a homogeneous flow rate distribution in the capillary gap which can thus lead to a reduction of selectivity and of local temperature increases. In addition, high ohmic resistance requires the use of conducting salts. The aim of the invention is to provide a reactor in which the voltage drop in the electrolyte is minimized and which can be better optimized over a short resistance time distribution. To this end, the capillary gap comprises at least one channel as a reaction chamber having a height less than or equal to 200 &mgr;m. According to the inventive method, the volume flow of the educt current is measured such that the flow of the educt current is laminar over the length of the channel having a height less than or equal to 200 &mgr;m.

Abstract: Disclosed is a method to simplify the handling of micro-components, wherein a micro-component is initially produced on a micro-component base plate. At least the open side surfaces of the micro-component are then cast using a hardening moulding material whereupon the base plate and/or the moulding material covering the micro-component is removed. The magazine for at least one micro-component comprises of a disk-shaped plate encompassing the micro-component at least one its lateral surfaces is positive joint. The assembly method for micro-components includes a magazine which is configured in the form of a disk-shaped plate containing at least one micro-component which encompasses at least on one of its sides in positive fit. Said magazine is held and maintained by a retaining device, whereupon the micro-component which is to be assembled is squeezed out of the magazine and simultaneously positioned in a specific location.

Abstract: A rolling bearing which has as rolling bearing components one bearing race with a first running surface, a second bearing race with a second running surface opposed to the first surface, and rolling elements arranged between the running surfaces. At least one sensing unit is integrated into the rolling bearing components. The sensing unit can be interrogated by radio via antennas or can be connected to an interrogator by a cable. The sensing unit uses at least one component operating on the SAW or BAW principle to sense changes in length and/or changes in temperature in the material of the rolling bearing component and sends the result of the measurement after the arrival of a radio signal via the antenna or via a cable.

Abstract: This invention relates to an optical multiple circuit breaker with (N) first optical inputs (E1) (n)), whereby these inputs can be switched optionally to (N) first or (N) second optical outputs (A1(n)) and/or (A2(n)). Light rays (LS1(n)) and LS2(n)) are reflected or transmitted from two surfaces (27, 28), to which end the at most two recesses (25) of a transparent base body (1) that form these surfaces are filled optionally with an optically thinner or denser material (26). In accordance with a first embodiment, both surfaces (27, 28) are so arranged that, in the reflecting switching state, the first inputs (E1(n)) are optically connected to the first outputs (A1(n)), and the second inputs (E2(n)) are connected to the second outputs (A2(n)), and that in the transmission switching state, the first input (E1(n)) are optically connected to the second outputs (A2(n)).

Abstract: The invention relates to an optical switching element for altering the propagation direction of at least one light beam, comprising a transparent base body (21), said base body being provided with a recess (20) for forming at least one boundary surface (19) between an optically denser medium and an optically more translucent medium. The incident light strikes this boundary surface (19). The recess (20) is filled partly with a liquid (26) and contains a moveable body (16). The liquid (26) and the moveable body (16) have approximately the same refractive index as the transparent base body. To switch the switching element (15) to a transmitting switching state, the moveable body is positioned in the recess in such a way that the gap between the boundary surface and the surface of the moveable body is filled completely with the liquid. If the moveable body is positioned in the recess in such a way that the boundary surface is free of the liquid, the incident light is reflected on said boundary surface.

Abstract: The invention relates to a matrix switch for optical fibers, exhibiting slides (S1(n)) arranged in lines, to each of which an input optical fiber (LWL1(n)) is fixed, and slides (S2(m)) arranged in columns to each of which an output optical fiber (LWL2(m)) is fixed. The slides with the optical fibers are arranged on two planes in such a way that the input optical fibers can be optically coupled to the output optical fibers by displacing the output and input slides. A device (1) with stops (2) arranged in lines and columns is provided to position the slides (S1(n)), (S21(m)) to which the input or output optical fibers (LWL1(n)), (LWL1(n)) are fixed. The positioning device (1) enables the advancement of the output slides (S2(m)) to be limited in such a way that the output slides are secured in an exact position in which the input optical fibers can be coupled to the output optical fibers.

Abstract: A method for fabrication of micro heat exchangers, which enable an efficient heat transfer between two flowing media. In a first processing step, a plastic layer is structurized by means of photolithography, x-ray deep lithography, or laser ablation. This plastic structure is galvanically molded in a second processing step, preserving the structural properties. The resulting metallic microstructure, which is the inverse of the original structure, is used as a shaping insert to produce the individual layers from which the micro heat exchanger is assembled. The method according to the invention makes it possible to cheaply produce large numbers of micro heat exchangers.

Abstract: The invention concerns a method for the fabrication of an optical component with at least one fiber taper receptacle and a coupled fiber taper For this, a microstructure body is first made by coating a substrate with resist, the height of the resist diminishing essentially continuously across one region of the substrate. Next, the resist is exposed to synchrotron radiation through a mask and then developed. By electroforming and molding methods, such as micro injection molding, replicas of the microstructure body are created in plastic, for example. The invention further concerns an optical component, which has at least one fiber taper receptacle and one coupled fiber taper. The fiber taper receptacle is configured as a trough with essentially rectangular cross section. The trough height and width decrease essentially continuously across at least one region.

Abstract: A micromembrane pump is described which is self-priming and self-filling. For this, the pump chamber (14) is so configured that in a drained condition of the pump chamber (14), the pump membrane (4) adjoins the pump chamber wall (22), which causes the volume of the pump chamber (14) to be minimized. For this, the pump chamber wall (22) can be flat, so that the pump membrane (4) adjoins the flat pump chamber wall (22) in its unshifted rest position. Preferably, the pump includes membrane valves which consist of a valve membrane (3) situated between two halves of the housing (1, 2), and valve seats (10, 16). It also includes a heteromorphic piezoactuator (5) attached to the pump membrane (4). The compact pump is suited to deliver gases and liquids, and can be manufactured in cost-effective fashion from only a few components.

Abstract: An optical near-field probe (1) includes a carrier component (10), which carries a tip (40), and has only one membrane (11, 20), transparent at least in the area of the tip (40), which is mounted on the light emission surface (9) of an optical waveguide (2) that is made of a rigid material such as glass or plastic. The dimensions of the membrane (11, 20), at least in one direction in the membrane plane, are less than or equal to the diameter of the optical waveguide (2). To position the tip (40) over the core (3) of the optical waveguide (2), optical methods can be used or the membrane and optical waveguide can be provided with locating elements.

Abstract: An X-ray radiolucent material consisting of a beryllium substrate and a protective coating connected to the substrate is produced by applying a protective coating comprised of at least one component selected from the group consisting of silicon oxide, silicon nitride, silicon carbide, and amorphous carbon. Preferably, a CVD process or sputtering is used to apply the protective coating.