Abstract: The present disclosure provides an adaptive optical retina imaging apparatus and method. The adaptive optical retina imaging apparatus comprises an optical processing unit, an adaptive optical unit, a two-dimensional scanning unit and a primary aberration correcting unit, in which an imaging unit included in the optical processing unit is imaging based on the signal after high order aberration compensation and low order aberration compensation.

Abstract: Provided are apparatuses and methods for super resolution imaging photolithography. An exemplary apparatus may include an illumination light generation device configured to generate illumination light for imaging a pattern included in a mask through the mask. The illumination light may include a high-frequency spatial spectrum such that a high-frequency evanescent wave component of spatial spectrum information for the light is converted to a low-frequency evanescent wave component after being transmitted through the mask pattern. For example, the illumination light generation device may be configured to form the illumination in accordance with a high numerical aperture (NA) illumination mode and/or a surface plasmon (SP) wave illumination mode.

Abstract: The present disclosure provides a high accuracy measurement system for focusing and leveling. The system determines an off-focus distance in the perpendicular direction within the exposure field and an inclination in the horizontal direction by measuring heights of four detection points on a substrate by using a four-channel detection method, thereby achieving focusing and leveling of the substrate. The detection of the substrate heights is implemented by a focusing method based on dual-channel light intensity modulation. Two superposed grating fringes are formed with phase difference of ?/2. The shift can be resolved by the phase variation of corresponding fringes. According to the method, the off-focus distance can be derived. The present disclosure effectively eliminates the error due to the intensity changes caused by the fluctuations of the source or the reflectance of the substrate surface. The apparatus for focusing and leveling is easy to be implemented and has an accuracy of nanoscale.

Abstract: The present disclosure provides a method for improving capability of resisting image noise of a co-phasing system of a dispersed fringe sensor. The method comprises the following steps: carrying out a coarse co-phasing adjustment by utilizing the dispersed fringe sensor until the coarse co-phasing is stabilized in a closed loop; collecting a two dimensional dispersed fringe image by the dispersed fringe sensor; superposing the dispersed fringe image along a dispersed direction so as to convert the two dimensional dispersed fringe image to a one dimensional image along an interferential direction; extracting peak values of the main peak, a left side lobe and a right side lobe of the one dimensional image along the interferential direction, and calculating corresponding piston error value of the image by carrying out a Left-subtracting-right LSR algorithm on these peak values.

Abstract: Provided are a microscopic surgery system and a navigation method guided by optical coherence tomography. The microscopic surgery system may include: an object lens; a surgical microscope unit configured to perform two-dimensional imaging on an area to operate on via the object lens; an optical coherence tomography unit configured to perform two-dimensional tomography imaging on the area via the object lens, with an imaging field calibrated according to that of the surgical microscope unit; a processor configured to obtain navigation information based on the two-dimensional imaging by the surgical microscope unit and the two-dimensional tomography imaging by the optical coherence tomography unit, the navigation information comprising positional information of a body part to operate on and a surgical instrument for operating on the body part; and an output unit configured to output the navigation information to guide the surgical instrument to the body part.

Abstract: An adaptive optical objective inspection instrument for optic nerve function comprises: a sub-system for measuring wave aberration of human's eyes, including a near infrared beacon light source, an intermediate optical system, a wavefront corrector and a wavefront sensor, configured to measure and obtain wave aberration of testee's eyes, the intermediate optical system arranged along an optical path between the near infrared beacon light source and the wavefront sensor, and the wavefront corrector arranged in the optical path of the intermediate optical system; a sub-system for correcting wave aberration of human's eyes, including the intermediate optical system, the wavefront corrector and a control unit, the control unit configured to drive and control the wavefront corrector to correct the wave aberration of testee's eyes according to the measured wave aberration; and a sub-system for inspecting optic nerve function, including a visual stimulus display and a system for collecting visual evoked potential si

Abstract: The present invention discloses a dual beamsplitting element based excimer laser pulse stretching device comprising two beam splitting elements and one confocal resonator. The first beamsplitting element splits incident laser beam into two beams, one beam enters the confocal resonator, generates a certain time delay and then is incident on the second beamsplitting element, and the second beam is directly incident on the second beamsplitting element. The second beamsplitting element further splits each of the incident laser beams into two beams, one of the two beams enters the confocal resonator, generates a certain time delay and is returned back to the first beamsplitting element to be further split, and the other of the two beams is combined with other beams which are direct outputs after being split by the beamsplitting elements or being optically delayed by the confocal resonator to form a stretched output beam.

Abstract: The present disclosure relates to a method for detecting focus plane based on Hartmann wavefront detection principle, the function of which is to detect the position of a silicon wafer in a photolithograph machine in real time so as to accomplish adjustment of the leveling and focus of the silicon wafer. By utilizing microlens array to detect the wavefront carrying information about the position of the silicon wafer based on the Hartmann wavefront detection principle, the spherical wavefront is divided by the respective subunits of the microlens array and is imaged on the respective focus planes of the subunits.

Abstract: The present disclosure provides detection devices and methods using a diffraction wavefront of a pinhole stitching measurement of surface shape. The light emitted from the laser passes through a filter hole, a first condenser lens, a spatial filter, a beam expander, a half wave plate, a ?/4 wave plate, an attention plate and then is transmitted through a beam splitter, reflected by a reflecting mirror and is irradiated onto an pinhole through a first optical adjustable shelf and a second set of condenser lens. A part of diffraction light generated by the pinhole is irradiated to the mirror to be measured; the light reflected by the mirror to be measured is reflected by a frame of the pinhole and generate a diffraction fringe along with another part of the diffraction wavefront of the pinhole. The interference fringe is focused by the third set of condenser lens on the third optical adjustable shelf and is collected by the CCD detector.

Abstract: There is provided a method of eliminating an offset in a spot centroid due to crosstalk. A crosstalk matrix is used to characterize crosstalk characteristics of a multi-pixel spot-centroid detector. Left-multiplication of signals outputted from the multi-pixel spot-centroid detector, which are affected by the crosstalk, by an inverse matrix of the crosstalk matrix can result in a light-intensity-distribution signal with impacts of the crosstalk substantially removed. Based on this light-intensity-distribution signal, it is possible to derive the spot centroid, with the offset in the spot centroid due to the crosstalk substantially eliminated, resulting in an improved accuracy of the spot centroid detection, as compared with conventional methods.

Abstract: Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.

Abstract: A binocular adaptive optics visual simulator and a method for binocular adaptive optics visual simulation are provided. An example method may comprise: directing beacon light to a left eye and a right eye of a subject, respectively; sensing aberrations of the left and right eyes of the subject, and sensing a deflection angle of a pupil of each of the left and right eyes; correcting the aberrations based on the sensed aberrations to achieve a desired aberration configuration between the left and right eyes; and changing a direction in which the beacon light is directed based on the sensed deflection angle in such a manner that in a case where the pupil is subjected to deflection, the beacon light is incident onto the pupil of each of the left and right eyes of the subject at a substantially identical angle before and after the deflection of the pupil.

Abstract: A ring light source system for an interferometer with adjustable ring radius and ring radial width may comprise a laser light source, an expander and collimator optical system, an adjustable aperture, a binary phase grating, a variable-focus optical system, and a spatial filter. The expander and collimator optical system is configured to convert a light beam from the light source into a parallel light beam. The adjustable aperture is configured to adjust a diameter of the parallel light beam. The light beam with the diameter adjusted by the adjustable aperture is incident perpendicularly onto the binary phase grating, followed by the variable-focus optical system. The filter is positioned on a back focal plane of the variable-focus optical system, and is configured to receive a ring light source. The ring radius and radial width of the light source are adjustable by adjusting a focus length f1 of the variable-focus optical system.

Abstract: A ring light source system for an interferometer with adjustable ring radius and ring radial width may comprise a laser light source, an expander and collimator optical system, an adjustable aperture, a binary phase grating, a variable-focus optical system, and a spatial filter. The expander and collimator optical system is configured to convert a light beam from the light source into a parallel light beam. The adjustable aperture is configured to adjust a diameter of the parallel light beam. The light beam with the diameter adjusted by the adjustable aperture is incident perpendicularly onto the binary phase grating, followed by the variable-focus optical system. The filter is positioned on a back focal plane of the variable-focus optical system, and is configured to receive a ring light source. The ring radius and radial width of the light source are adjustable by adjusting a focus length f1 of the variable-focus optical system.

Abstract: Disclosed is a focus detection apparatus for a projection lithography system. The apparatus comprises: a laser; a focus optical unit configured to focusing the emitted laser beam; a force detection unit configured to reflect the focused laser beam at the backside; a position detection unit configured to detect variations in position of a light spot formed by the reflected laser beam, and output a strength signal indicating the strength of the interaction force between the force detection unit and the object; a differential amplifier configured to output a Z-direction differential signal based on the strength signal and a reference signal; a Z-direction feedback control unit configured to perform feedback control; and a scan signal generator configured to output a signal for controlling the movement of the stage in the XY plane. The focus detection apparatus has high precision, efficiency and process applicability.

Abstract: Apparatus and methods for measuring reflectance of optical laser components are disclosed. In one embodiment, when the reflectance of the test optical laser component is higher than 98%, a cavity ring-down (CRD) technique based configuration is employed to measure the reflectance of the test optical laser component. On the other hand, when the reflectance of the test optical laser component is lower than 98% or there is no measurable CRD signal, by removing the output cavity mirror in the CRD apparatus, a photometric configuration is formed to measure the reflectance. The switching between the two techniques can be achieved by removing or inserting the output cavity mirror of the ring-down cavity in the CRD apparatus.

Abstract: The present invention provides a method of fast image construction. The wavelength information is extracted in advance based on characteristics of a Fourier domain Optical Coherent Tomography (OCT) system, to obtain a vector of wavelengths which are in a uniform distribution in a wave number space, and thus to obtain a virtual position coefficient of this wavelength vector at a CCD, from which a weight matrix is calculated based on a transfer function for a discrete Fourier transform with zero-padding interpolation. In operation of the system, the interpolation is carried out based on the weight matrix and collected data, or is carried out based on the weight matrix which has been truncated by being subject to windowing and the collected data, to obtain interpolated data satisfying requirements.

Abstract: Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.

Abstract: A customizing equipment for individualized contact lenses comprises an uniform illumination system, a gray image generation system, a projection optical system, a stage system and an alignment system, among which the uniform illumination system generates uniform parallel illuminative light, which generates gray images through the gray image generator controlled by a computer after going through the gray image generation system according to detection results of aberration of human eyes, and images on the image plane of given radius of curvature with photoresist on the samples' surface, which is fixed on the stage system and adjusted to the correct position through the alignment system, after the gray images are zoomed and the curvature of the image field is corrected through the projection optical system, so that the photoresist on the samples' surface will be exposed according to the gray levels of the gray images, after which the exposed samples are developed and etched to obtain the device with continuous e

Abstract: The present invention proposes a two-eye adaptive optical visual perception training apparatus, comprising: left and right eye wave aberration measurement sub-systems for measuring eye wave aberrations of the left and right eyes of a person to be tested; left and right eye wave aberration correction sub-systems for driving and controlling the wavefront corrector to correct the wave aberrations of the left and right eyes of the person to be tested based on the measured wave aberrations of the left and right eyes of the tested person; and a two-eye visual perception training sub-system for processing and displaying sighting targets of different spatial frequencies and different contrasts and presenting the sighting targets to the tested person, to conduct a two-eye visual function measurement process and a visual perception training process.