Patents Assigned to Instituto Nazionale DiFisica Nucleare
  • Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
    Patent number: 5306406
    Abstract: A method of providing a thin film for lining quarter-wave resonant cavities of copper comprises the deposition of a superconducting material, in particular niobium, in the form of a micro-layer having a substantially constant thickness covering both the cylindrical surface of the cavity and its bottom formed of a plane plate, by biased-diode d.c. sputtering through emitting cathodes in a form fitting geometrically the surfaces to be lined.
    Type: Grant
    Filed: August 14, 1992
    Date of Patent: April 26, 1994
    Assignee: Instituto Nazionale DiFisica Nucleare
    Inventors: Vincenzo Palmieri, Renato Preciso, Vladimir L. Ruzinov