Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.

Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.

Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.

Abstract: A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.

Abstract: A high purity, high precision pump capable of pumping more than one type of chemistry or process fluid without requiring cleaning or changing of surfaces contacting the processing fluid. The pump employs a single drive mechanism coupled in parallel with multiple pumping chambers, each capable of handling a different type of manufacturing fluid. The pump can be utilized as part of a single stage or multi-stage pump system.

Abstract: A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.

Abstract: A method and system for dispensing a precise amount of a fluid utilizing a rolling membrane pumping system is disclosed. In the preferred embodiment, the method comprises calculating an amount by which to change a dispense based at least in part on a predicted membrane flex if a particular dispense is other than a first dispense, wherein said predicted membrane flex is based at least in part on a maximum pump chamber pressure during the first dispense; calculating an amount by which to change a dispense based at least in part on a shape of the membrane if a particular dispense is a first dispense; moving a piston in the pumping system based at least in part on the calculated amount; opening an output valve of the pumping system; monitoring the pump chamber pressure to detect a sudden decrease in said pump chamber pressure to signal a mechanical failure in the pumping system; and determining a maximum pressure in the pump chamber during the movement of the piston.