Patents Assigned to Integrated Designs L.P.
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Patent number: 10132309Abstract: A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.Type: GrantFiled: March 10, 2014Date of Patent: November 20, 2018Assignee: INTEGRATED DESIGNS, L.P.Inventors: Donovan K. Manzarek, John C. Vines, John Laessle
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Patent number: 10092862Abstract: A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a gas removal reservoir having at least one vertical partition therein and at least one free end near a top side of the gas removal reservoir where both the input and output to the gas removal reservoir are located on a bottom surface and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the gas removal reservoir when trapped gas in the filter is removed.Type: GrantFiled: August 29, 2014Date of Patent: October 9, 2018Assignee: INTEGRATED DESIGNS, L.P.Inventors: John C. Vines, John Laessle
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Patent number: 9739274Abstract: A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.Type: GrantFiled: March 10, 2014Date of Patent: August 22, 2017Assignee: INTEGRATED DESIGNS, L.P.Inventors: John C. Vines, John Laessle
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Patent number: 9719504Abstract: A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.Type: GrantFiled: March 10, 2014Date of Patent: August 1, 2017Assignee: INTEGRATED DESIGNS, L.P.Inventors: John C. Vines, John Laessle
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Publication number: 20140277672Abstract: A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.Type: ApplicationFiled: March 10, 2014Publication date: September 18, 2014Applicant: Integrated Designs, L.P.Inventors: Donovan K. Manzarek, John C. Vines, John Laessle
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Publication number: 20140271265Abstract: A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.Type: ApplicationFiled: March 10, 2014Publication date: September 18, 2014Applicant: Integrated Designs, L.P.Inventors: John C. Vines, John Laessle
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Publication number: 20140271252Abstract: A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.Type: ApplicationFiled: March 10, 2014Publication date: September 18, 2014Applicant: Integrated Designs, L.P.Inventors: John C. Vines, John Laessle
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Publication number: 20130309105Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.Type: ApplicationFiled: July 26, 2013Publication date: November 21, 2013Applicant: Integrated Designs L.P.Inventors: John Laessle, John Vines, Brian Kidd
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Patent number: 8535021Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.Type: GrantFiled: November 6, 2012Date of Patent: September 17, 2013Assignee: Integrated Designs, L.P.Inventors: John Laessle, John Vines, Brian Kidd
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Publication number: 20130129529Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.Type: ApplicationFiled: November 6, 2012Publication date: May 23, 2013Applicant: INTEGRATED DESIGNS L.P.Inventor: Integrated Designs L.P.
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Patent number: 8441222Abstract: A system for measuring current in an H-Bridge motor drive circuit and using that current to determine the output of a device powered by the motor. A particular embodiment is disclosed for a motor-driven fluid pump. Motor current is measured at predetermined pump pressures and flow rates to create calibration tables relating motor current to pump pressure. Once calibrated, the system determines pump pressure based on motor current by referring to the calibration tables. In an embodiment, the pump is driven to achieve a predetermined fluid dispense profile. The system monitors pump pressure by measuring motor current and determines if the dispense profile is being achieved and sets alarms if predetermined thresholds are not maintained. The system also detects pump wear based on the current measurements and issues warnings to the user in such conditions.Type: GrantFiled: July 14, 2010Date of Patent: May 14, 2013Assignee: Integrated Designs, L.P.Inventors: Donovan Keith Manzarek, John Laessle, John Charles Vines
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Patent number: 8317493Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.Type: GrantFiled: January 14, 2010Date of Patent: November 27, 2012Assignee: Integrated Designs L.P.Inventors: John Laessle, John Vines, Brian Kidd
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Patent number: 8047815Abstract: A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.Type: GrantFiled: November 12, 2007Date of Patent: November 1, 2011Assignee: Integrated Designs L.P.Inventors: Raymond T. Savard, Greg Gray, John Laessle
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Publication number: 20110030484Abstract: A system for measuring current in an H-Bridge motor drive circuit and using that current to determine the output of a device powered by the motor. A particular embodiment is disclosed for a motor-driven fluid pump. Motor current is measured at predetermined pump pressures and flow rates to create calibration tables relating motor current to pump pressure. Once calibrated, the system determines pump pressure based on motor current by referring to the calibration tables. In an embodiment, the pump is driven to achieve a predetermined fluid dispense profile. The system monitors pump pressure by measuring motor current and determines if the dispense profile is being achieved and sets alarms if predetermined thresholds are not maintained. The system also detects pump wear based on the current measurements and issues warnings to the user in such conditions.Type: ApplicationFiled: July 14, 2010Publication date: February 10, 2011Applicant: INTEGRATED DESIGNS, L.P.Inventors: Donovan Keith Manzarek, John Laessle, John Charles Vines
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Publication number: 20100158716Abstract: A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.Type: ApplicationFiled: January 14, 2010Publication date: June 24, 2010Applicant: INTEGRATED DESIGNS, L.P.Inventors: Jack Laessle, John Vines, Brian Kidd
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Publication number: 20090016909Abstract: A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.Type: ApplicationFiled: November 12, 2007Publication date: January 15, 2009Applicant: INTEGRATED DESIGNS L.P.Inventors: Raymond T. Savard, Greg Gray
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Publication number: 20090016903Abstract: A high purity, high precision pump capable of pumping more than one type of chemistry or process fluid without requiring cleaning or changing of surfaces contacting the processing fluid. The pump employs a single drive mechanism coupled in parallel with multiple pumping chambers, each capable of handling a different type of manufacturing fluid. The pump can be utilized as part of a single stage or multi-stage pump system.Type: ApplicationFiled: July 13, 2007Publication date: January 15, 2009Applicant: INTEGRATED DESIGNS L.P.Inventors: Raymond T. Savard, Greg Gray, Jack Laessle
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Patent number: 6742993Abstract: A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.Type: GrantFiled: November 11, 2002Date of Patent: June 1, 2004Assignee: Integrated Designs, L.P.Inventors: Raymond T. Savard, John C. Vines
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Patent number: 6554579Abstract: A system and method for reducing the time for charging a filter in a liquid dispensing system, such as one utilizing a positive displacement pump, is disclosed. The filter is located at the input side of the pump between the source of the liquid and the pump. In order to prevent air from the filter from entering the pump a reservoir is provided between the filter and the source of the fluid. Air from the filter is vented into the reservoir through a vent tube. A vacuum is used to draw air from the filter and, through the reservoir.Type: GrantFiled: March 28, 2002Date of Patent: April 29, 2003Assignee: Integrated Designs, L.P.Inventors: Carl A. Martin, Vernon H. Foersterling, Darko Hadzidedic, Raymond T. Savard, Gary Minor
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Publication number: 20030062382Abstract: A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.Type: ApplicationFiled: November 11, 2002Publication date: April 3, 2003Applicant: Integrated Designs, L.P.Inventors: Raymond T. Savard, John C. Vines