Abstract: An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.

Abstract: A vibration isolator with a pneumatic spring that is effective only in vertical direction, the pneumatic spring including a working space in which a vertically effective actuator is disposed.

Abstract: A stationary vibration isolation system including a plurality of isolators by way of which a load which is mounted in a vibration isolated manner is supported. The vibration isolation system includes a plurality of actuators by way of which vibrations of the load are actively countered. Each isolator respectively has its own separate control unit with a digital-analog converter for controlling the actuators.

Abstract: An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.

Abstract: The invention relates to an environmental noise shielding apparatus in which the internal temperature can be matched to the external temperature by means of a cooling element which is arranged within the environmental noise shielding apparatus. This allows a better sound protection effect.

Abstract: A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.

Abstract: A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.

Abstract: The invention relates to a maintenance apparatus for a clean room or for systems in the clean room comprising a system component which can be moved horizontally and vertically. The system component is suspended on magnetic rails.

Abstract: The invention relates to a vibration isolator with a pneumatic spring. The vibration isolator comprises a leaf spring assembly for vertical isolation and a flexible rod or a buckling pendulum for horizontal isolation.

Abstract: An active vibration absorber is provided for damping vibrations of a cantilevered portion of a support structure. The vibration absorber comprises a mass, a drive and a control device. The mass is coupled without using a spring and through the drive to a fastening means for fastening the drive to the support structure, so that upon a movement of the mass relative to the fastening means an inertial force caused by this movement is directly transmitted through the drive to the fastening means. The control device comprising a motion sensor is adapted to control the drive in function of a signal from the motion sensor. The active vibration absorber is designed to damp especially low-frequency vibrating structures including more than one mass-spring element so that the vibration amplitude thereof is significantly reduced.

Abstract: The invention relates to a stationary vibration isolation system and to a method for controlling such a system which comprises a damper effective in a horizontal direction which includes a fluid of variable viscosity.

Abstract: The invention relates to a vibration isolator that includes a coil spring. In a horizontal direction, the coil spring is stiffly coupled to the base or to the load to be isolated.

Abstract: A vibration isolation system which comprises a support divided into a plurality of rigid sections on which a displaceable stage is arranged. The sections are arranged on pneumatic bearings, and the pneumatic bearings of the individual sections are controlled independently from each other and based on the position of the displaceable stage.

Abstract: Method and arrangement for oscillation isolation by means of an air bearing. The electropneumatic valves (4) for the compressed-air supply to the air bearing are subjected to a dither signal. This causes additional vibration of the mass 1 to be isolated. A compensation signal transmitter (12) ensures that additional vibration of the mass (1) is suppressed, by controlling actuators (10). Overall, hysteresis effects are avoided in the control of the compressed-air flow.

Abstract: The invention relates to an active vibration isolation system which detects structural vibration of the mass to be isolated via a sensor and also takes account of these disturbance variables.

Abstract: The invention relates to a stationary vibration isolation system and to a method for controlling such a system which comprises a damper effective in a horizontal direction which includes a fluid of variable viscosity.

Abstract: An examination and processing machine, in particular a lithography appliance, for use in the semiconductor industry, comprising a machine frame (1), an examination or processing device (5) for a work piece (4), a carriage (3) which is mounted on the machine frame (1) and can hold the work piece (4), a handling device (6) for positioning the work piece (4) on the carriage (3) and for removing it from the carriage (3), a series of oscillation isolators (2) for low-oscillation mounting of the machine frame (1), and individual control devices (30, 40, 20) for controlling the carriage (3), the handling device (6) and the oscillation isolators (2). These control devices (20, 30, 40) are subordinate to an overall control device (50), which acts as a host system, via a real-time bus (60).

Abstract: An active vibration absorber is provided for damping vibrations of a cantilevered portion of a support structure. The vibration absorber comprises a mass, wherein the mass is coupled without using a spring and through a drive that is controlled by a control device of the vibration absorber to a fastening means for fastening the drive to a support structure to be damped, so that upon a movement of the mass relative to the fastening means an inertial force caused by this movement is directly transmitted through the drive to the fastening means, and wherein the control device comprises a motion sensor and the control device is adapted to control the drive in function of the signals from the motion sensor. The active vibration isolator has a purpose of damping especially low-frequency vibrating structures including more than one mass-spring element so that the vibration amplitude thereof is significantly reduced.

Abstract: The present invention relates to a method for regulating an active vibration isolation system and to an active vibration isolation system, in particular for a vibration isolated positioning of lithography-devices, wafer-handling-systems and/or microscopes, as for instance scanning microscopes. The active vibration isolation system comprises the following components: a support body for bearing a load which is to be isolated; pneumatic vibration isolators with controllable valves for carrying the support body with respect to the ground; position sensors for providing vertical position signals of the support body; a first regulating system for vibration compensation in at least one degree of freedom in translation (Xt,Yt,Zt) and in at least one degree of freedom in rotation (Xr,Yr,Zr) and a second pneumatic regulating system for vibration compensation in at least one degree of freedom selected from three degrees of freedom (Zt,Xr,Yr) which are effective in vertical direction.

Abstract: A device for compensating magnetic fields, comprising a single magneto resistive sensor to which at least two parallel measuring amplifier loops are connected in series, one being an analogue broadband controller loop and the other being a digital broadband controller loop.