Patents Assigned to Integrated Dynamics Engineering, Inc.
  • Edge-gripping pre-aligner
    Patent number: 6468022
    Abstract: An apparatus for holding and orienting a wafer having an alignment feature, and including a movable robot arm; and an end effector attached to an end of the robot arm, the end effector including a gripping mechanism which during operation both holds the wafer and rotates it about an axis that is perpendicular to the plane of the wafer and a sensing element for detecting the alignment feature on the wafer as the gripping mechanism rotates the wafer past the sensing element.
    Type: Grant
    Filed: July 5, 2000
    Date of Patent: October 22, 2002
    Assignee: Integrated Dynamics Engineering, Inc.
    Inventor: Preston Whitcomb