Abstract: A linear process tool comprising at least two deposition modules each comprising one or more plasma spray guns operable to move in a direction approximately orthogonal to the direction of a substrate carrier is configured to deposit at least a first and second layer, in direct contact with each other, wherein a first layer is of first composition and the second layer is of second composition different than the first composition.
Type:
Application
Filed:
May 27, 2010
Publication date:
December 2, 2010
Applicant:
Integrated Photovoltic, Inc.
Inventors:
Raanan Zehavi, Sharone Zehavi, Lawrence Hendler, Tatyana Dulkin