Abstract: A device and method capable of sensing the presence of biochem agents, and preferably also capable of delivering precise amounts of one or more antidotes to treat a victim exposed to the agents. The device includes a freestanding tube portion having an internal passage containing a substance selective to a chemical or biological agent so that matter accumulates within the freestanding tube portion when a fluid drawn through the tube portion contains the agent. When vibrated at resonance, the resonant frequency of the tube portion is indicative of the accumulation of matter and thereby the presence of the agent to which the substance is selective. The device then preferably delivers precise amounts of one or more appropriate antidotes to treat the victim. The device is a sufficiently small and lightweight unit to permit being carried by an individual.

Abstract: A method and device for performing lysing on a cell-containing fluid, in which the fluid flows through a vibrating micromachined tube to physically rupture the cell walls (mechanical lysis), and/or to mix, agitate or homogenize the fluid during chemical lysis, and/or to mix, agitate or homogenize the lysate for analysis or other processing after lysing. The tube includes a freestanding portion spaced apart from a surface of a substrate on which the tube is formed. The device further includes means for vibrating the freestanding portion of the tube at a level sufficient to rupture the walls of cells in a fluid flowing through the freestanding portion (for mechanical lysing) or to mix the fluid and a chemical lysing additive within the freestanding portion (for chemical lysing).

Abstract: A microneedle and a process of forming the microneedle of single-crystal silicon-based material without the need for deposited films. The microneedle comprises a piercing end, an oppositely-disposed second end, and an internal passage having an opening adjacent the piercing end. The cross-section of the microneedle, and therefore the passage within the microneedle, is defined by first and second walls formed of doped single-crystal silicon-based material and separated by the passage, and first and second sidewalls separated by the passage, sandwiched between the first and second walls, and formed of single-crystal silicon-based material that is more lightly doped than the first and second walls.

Abstract: A sensing device that comprises a micromachined tube on a substrate for resonant sensing of mass flow and density of a fluid flowing through the tube. The sensing device further incorporates on the same substrate at least a second micromachined tube configured for sensing another property of the fluid, such as pressure, viscosity and/or temperature.

Abstract: A method and device for performing fluid analysis by separating cells and/or particles from a fluid, such as a biological, vehicular or industrial fluid. The device is a micromachined filtering device comprising a substrate with through-thickness vias having approximately equal diameters that prevent passage through the substrate of a first material while permitting passage through the substrate of other materials having diametrical dimensions less than the diameter of the vias. Electrodes are located on a surface of the substrate between vias so that as the first material collects at the surface of the substrate, the electrodes become electrically connected to produce an output signal in some proportion to the amount of the first material collected. The device can incorporate multiple micromachined substrates, yielding an analysis system that produces an electrical output for each of a number of properties or parameters.