Patents Assigned to Integrated Solutions Co., Ltd.
  • Publication number: 20100128239
    Abstract: In an exposure apparatus, exposure light from a lamp (continuous light source) (9) is applied at an exposure station (exposure section) (2) to a substrate (4), which is being transferred at a fixed speed in a fixed direction by a substrate transfer section (5), through a mask (11) arranged on an optical axis (optical path) (S) of an exposure optical system (3). At the time of exposing an image of an opening section (11a) of the mask (11) on the substrate (4), the front edge and the side edge (pattern edge) of a pixel (reference pattern) (18) previously formed on the substrate (4) are photographed by a linear CCD (20) of an imaging section (6), and a reference position in the transfer direction and a direction vertical to such direction on the substrate (4) is detected.
    Type: Application
    Filed: June 7, 2006
    Publication date: May 27, 2010
    Applicant: Integrated Solutions Co., Ltd.
    Inventor: Jin Iino