Abstract: An enclosure provided with an air supply system, an exhaust system, and controls for manipulating the flow, temperature, dewpoint and relative humidity of the air within the enclosure are disclosed. The present invention aims to achieve with these components a system for containing chemical contaminants created during processing of silicon wafers during the chemical/mechanical, polishing/planarization processes involved in creating those wafers. The system prevents drying of the slurry used to process wafers by controlling the relative humidity within the enclosure via a humidifier, sensors and a controller that dynamically reacts to changes within the enclosure atmosphere. Preventing slurry drying is critical to maintaining high wafer throughput by reducing gouging and scraping of wafers and also by reducing equipment down time needed to clean dried slurry.

Abstract: An environmental control system including a modular isolation chamber wherein work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, Use of the portable, modular chambers also permits control over particulate contaminates and individualized regulation of differing processing environments within a single room.

Abstract: An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.

Abstract: An environmental control system including a modular isolation chamber wherein the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located. Use of the portable, modular chambers also permits control over particulate contaminates and individualized regulation of differing processing environments within a single room.