Patents Assigned to INTELLIGENT FLUIDS GMBH
  • Photoresist stripping using intelligent liquids
    Patent number: 10053655
    Abstract: The invention present describes novel cleaning agents based on a multiphase system, the use thereof for removing photoresist coatings from surfaces, and a method for removing photoresist coatings from surfaces. The multiphase system according to the invention is used in particular for removing coatings, photoresist coatings, polymer layers, dirt layers, insulation layers, and metal layers from surfaces.
    Type: Grant
    Filed: October 13, 2014
    Date of Patent: August 21, 2018
    Assignee: INTELLIGENT FLUIDS GMBH
    Inventor: Dirk Schumann