Abstract: An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.

Abstract: An MEOMS sensing chip for optically detecting and measuring substances in fluid samples is disclosed. The MEOMS sensing chip includes a system for optically sensing substances in the fluid samples and a system for delivering the fluid samples to the sensing system. The sensing system includes a two-branch channel waveguide and a plurality of ring waveguides, each branch in the two-branch waveguide being used for evanescently coupling light energy into one of the ring waveguides. The delivering system includes a plurality of micro-channels and a plurality of micro-wells, the micro-channels being used for transporting the fluid samples to the micro-wells. Each micro-well is aligned with a respective ring waveguide and is used for exposing the fluid sample contained therein to the respective ring waveguide. Characteristics related to the evanescent coupling of the light energy into the ring waveguides, e.g., resonant frequencies of the ring waveguides, are used for detecting substances in the fluid samples.

Abstract: Methods and apparatus are provided for sealing and reducing warpage in a microsystem device. The microsystem device is assembled with a substrate and packaged.

Abstract: A latching mechanism is provided for selectively latching mirrors in an optical switch. The mirrors are selectively movable between rest and actuated positions. The latching mechanism provides stable latching of mirrors in an actuated position, i.e., without power being applied to maintain the actuated state.

Abstract: One embodiment is directed to a mirror device (for a device such as an optical switch, scanner or projector) having a movable mirror structure with an attached magnet. The mirror structure is movably mounted on a base structure, which includes an actuation coil for controlling movement of the mirror structure. Another embodiment is directed to a mirror device (in a device such as an optical switch, scanner or projector) having a high mirror fill factor. The device includes a mirror mounted on a support member, which is connected to a gimbal frame. The support member includes an enlarged portion configured to at least partially extend over the gimbal frame. The mirror substantially covers the enlarged portion of the support member, thereby providing the device with a high mirror fill factor. A further embodiment is directed to a mirror support structure for a movable mirror device (in a device such as an optical switch, scanner or projector).

Abstract: A device for rapid optical switching includes a membrane having a reflecting surface on at least a portion of an upper surface of the membrane, first and second spacers at opposing ends of the membrane for securing the membrane to a substrate, whereby the membrane is spaced apart from the substrate, and first and second actuation electrodes positioned on the same side of the membrane and spaced a distance from the membrane so as to form a gap therebetween, whereby actuation of the actuation electrodes applies a force to the membrane to tilt the reflective portion of the membrane at an angle with respect to the substrate.

Abstract: An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.

Abstract: Simple passive ring resonator laser gyro. The gyro eliminates the need to separately control the frequency of the two oppositely directed beams. The gyro eliminates the need to alternatively switch the light source at fixed steps of time between the two frequencies at which each of the oppositely directed beams are in resonance. A semiconductor laser diode, the beam source, is locked to one signal and its output is coupled into a closed geometric shape waveguide resonator and then sampled by detectors. The laser beam is maintained at the resonant frequency of one of the directions of propagation in the waveguide resonator. This frequency is determined by a process of modulating and demodulating the beam with a substantially sinusoidal waveform. As such the gyro need not actively switch the laser between the resonant frequencies of both of the directions of propagation in the waveguide resonator.