Abstract: In order to produce an antireflective layer, a coating solution containing at least one metal alkoxy compound and at least one polymer as solid components that are dissolved in a solvent is applied to a substrate that is to be coated by means of a pouring device with a wide slit, the polymer being immiscible and essentially inert in a chemical manner towards the metal alkoxy compound. A layer which is provided with a nanoporous structure having a refractive index that is preferably smaller than 1.22 as well as good antireflective properties is obtained by selective removal of the polymer and thermochemical hardening of the coating.
Type:
Application
Filed:
May 21, 2003
Publication date:
November 3, 2005
Applicant:
INTERFLOAT CORPORATION
Inventors:
Stefan Walheim, Jurgen Steps, Martin Holzbecher