Abstract: A semantic query over a corpus of data is constructed using a graphical user interface to create an aggregation of graphical representations of annotations associated with a plurality of data elements contained within the corpus of data and graphical representations of search terms contained within the plurality of data elements. The aggregation includes at least one annotation and at least one search term. The relative positions of the graphical representations of the annotations and the search terms are manipulated within the aggregation within the graphical user interface to express relationships among the annotations and search terms, yielding a visual spatial representation of the semantic query. The annotations, search terms and expressed relationships define the semantic query that is used to search the corpus of data.

Abstract: Low-temperature in-situ techniques are provided for the removal of oxide from a silicon surface during CMOS epitaxial processing. Oxide is removed from a semiconductor wafer having a silicon surface, by depositing a SiGe layer on the silicon surface; etching the SiGe layer from the silicon surface at a temperature below 700 C (and above, for example, approximately 450 C); and repeating the depositing and etching steps a number of times until a contaminant is substantially removed from the silicon surface. In one variation, the deposited layer comprises a group IV semiconductor material and/or an alloy thereof.