Patents Assigned to International Business Machines Corporation and Infineon Technologies North America Corp.
  • Publication number: 20030080761
    Abstract: A method for determining the electromigration characteristics of a wiring structure in an integrated circuit device is disclosed. In an exemplary embodiment of the invention, the method includes configuring a defined test structure type for the integrated circuit device. The defined test structure type further includes a first line of wiring primarily disposed in a principal plane of a semiconductor substrate, and a second line of wiring connected to the first line of wiring. The second line of wiring is disposed in a secondary plane which is substantially parallel to the principal plane, with the first and second lines of wiring being connected by a via structure therebetween. A thermal coefficient of resistance for the first line of wiring and the via structure is determined, and a wafer-level stress condition is introduced in a first individual test structure of the defined test structure type.
    Type: Application
    Filed: October 26, 2001
    Publication date: May 1, 2003
    Applicant: International Business Machines Corporation and Infineon Technologies North America Corp.
    Inventors: Ronald G. Filippi, Alvin W. Strong, Timothy D. Sullivan, Deborah Tibel, Michael Ruprecht, Carole Graas