Abstract: The present invention provides a method for producing a conducting doped diamond-like nanocomposite film containing, as basic elements, carbon, silicon, metal, oxygen and hydrogen. The film is produced as follows: a substrate is disposed in a vacuum chamber, and a voltage of 0.3-5.0 kV is applied to the substrate; a gas discharge plasma with an energy density of more than 5 kilowatt-hour/gram-atom of carbon particles is generated, and an organosiloxane compound is evaporated into the plasma; a beam of particles of a dopant is introduced into the plasma; and a film is grown on the substrate to produce a conducting doped carbon nanocomposite film with a predetermined relationship of atomic concentrations of carbon, metal and silicon. The film surface is coated with a silicon dioxide layer. A unidirectional alternating current is passed through the film in a current generator mode to effect electric thermal exposure of the film.

Abstract: The present invention provides a pulsed carbon plasma apparatus to produce a diamond-like carbon coating over an extended object, the coating having a high degree of thickness uniformity achieved by scanning the plasma flow over the surface of the object. The pulsed carbon plasma apparatus of the invention comprises a carbon plasma flow scanning device having at least one pair of deflecting coils, where the deflecting coils have, in the scanning plane, a different number of turns on opposite sides. The object may be made of metal, ceramic, glass or plastic. The coatings may be used to improve life and operating performance of tools and machine parts, and as decorative coatings.

Abstract: The present invention provides a vacuum coating apparatus to produce high quality coatings with a low degree of roughness and a high degree of thickness uniformity. The vacuum coating apparatus comprises a consumable metal cathode coupled to an arc discharge power supply and accommodated in a housing used as an anode, which is electrically coupled to a vacuum chamber and connected to the arc discharge dc power supply, a solenoid disposed on the anode, and an arc striking system connected to an initiation unit. The present invention is suitable for producing coatings based on metals, such as titanium, aluminum, chromium, zirconium, etc., as well as for depositing wear-resistant coatings based on compounds of the above metals, e.g. titanium nitride, aluminum nitride, chromium nitride, zirconium nitride, etc. The coatings may be used to improve life and operating performance of tools and machine parts, and as decorative coatings.