Patents Assigned to International Test Solutions, Inc.
  • Patent number: 11035898
    Abstract: A thermally conductive material, device, and method for predictably maintaining the temperature state and condition of the contact elements and support hardware of a tester interface, such as a probe card, for a testing apparatus, such as automated test equipment (ATE), that has a predetermined configuration applicable for the particular pin contact elements, thermal conditions. The thermally conductive device also has a substrate having a predefined form factor which can be readily introduced into the testing apparatus during normal testing operations. Unlike a patterned substrate that is constrained to specific probe element layouts, the unpatterned surface of the heat conductive device facilitates use with multiple probe card designs within numerous automated test equipment (ATE) tools.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: June 15, 2021
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, Jerry J. Broz, Wayne C. Smith, Mark M. Stark
  • Patent number: 10896828
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: January 19, 2021
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Patent number: 10843885
    Abstract: Novel materials and devices can remove small defects from long rolls of flexible electronics material while they are in continuous motion. The cleaning materials are designed to remove small particles without transferring defects or damaging the flexible electronics. The device generally consists of variable speed, motor-driven cylinders mounted on moveable brackets. The cylinders are capable of matching the speed of the cleaning material such that the cleaning material is always in contact with the web roll to be cleaned. The brackets are capable of rotating so the same material can be used more than once. Another material is used to remove debris from the cleaning material. A similar device consisting of motor-driven cylinders and moveable is used to apply the debris removal film to the cleaning film, allowing the cleaning film to be used multiple times.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: November 24, 2020
    Assignee: INTERNATIONAL TEST SOLUTIONS, INC.
    Inventors: Mark M. Stark, Alan E. Humphrey
  • Patent number: 10792713
    Abstract: A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: October 6, 2020
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, Bret A. Humphrey, Jerry J. Broz, Wayne C. Smith
  • Publication number: 20200303217
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Application
    Filed: June 8, 2020
    Publication date: September 24, 2020
    Applicant: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Patent number: 10741420
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Grant
    Filed: September 20, 2018
    Date of Patent: August 11, 2020
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Patent number: 10717618
    Abstract: Novel materials and devices can remove small defects from long rolls of flexible electronics material while they are in continuous motion. The cleaning materials are designed to remove small particles without transferring defects or damaging the flexible electronics. The device generally consists of variable speed, motor-driven cylinders mounted on movable brackets. The cylinders are capable of matching the speed of the cleaning material such that the cleaning material is always in contact with the web roll to be cleaned. The brackets are capable of rotating so the same material can be used more than once. Another material is used to remove debris from the cleaning material. A similar device consisting of motor-driven cylinders and movable is used to apply the debris removal film to the cleaning film, allowing the cleaning film to be used multiple times.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: July 21, 2020
    Assignee: INTERNATIONAL TEST SOLUTIONS, INC.
    Inventors: Mark M. Stark, Alan E. Humphrey
  • Patent number: 10406568
    Abstract: A cleaning film designed to remove foreign matter and particulates from working surfaces of cleaning wafers used in semiconductor processes. These processes include wafer sort test for cleaning of probe card pins and FEOL tooling for cleaning during wafer handling equipment and wafer chucks. The debris collected on the cleaning wafer working surfaces is removed by the particle removal film allowing the debris and foreign matter to be discarded. The use of the cleaning film allows the operator to refresh the cleaning wafer without use of an outside vendor and eliminates wet washing and the use of solvents in the cleaning process.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: September 10, 2019
    Assignee: International Test Solutions, Inc.
    Inventors: Alan Humphrey, Jerry Broz, James H. Duvall
  • Patent number: 10361169
    Abstract: A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material may include a cleaning pad layer and one or more intermediate layers that have predetermined characteristics.
    Type: Grant
    Filed: October 2, 2017
    Date of Patent: July 23, 2019
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, Wayne C. Smith, Janakraj Shivlal, Bret A. Humphrey
  • Patent number: 10239099
    Abstract: A cleaning film designed to remove foreign matter and particulates from working surfaces of cleaning wafers used in semiconductor processes. These processes include wafer sort test for cleaning of probe card pins and FEOL tooling for cleaning during wafer handling equipment and wafer chucks. The debris collected on the cleaning wafer working surfaces is removed by the particle removal film allowing the debris and foreign matter to be discarded. The use of the cleaning film allows the operator to refresh the cleaning wafer without use of an outside vendor and eliminates wet washing and the use of solvents in the cleaning process.
    Type: Grant
    Filed: November 20, 2017
    Date of Patent: March 26, 2019
    Assignee: International Test Solutions, Inc.
    Inventors: Alan Eugene Humphrey, Jerry J. Broz, James H. Duvall
  • Patent number: 10195648
    Abstract: A cleaning material for predictably cleaning the contact elements and support hardware of a tester interface, such as a probe card and a test socket, has a cleaning pad layer, one or more intermediate layers having a set of predetermined characteristics and having a plurality of abrasive particles.
    Type: Grant
    Filed: July 28, 2014
    Date of Patent: February 5, 2019
    Assignee: International Test Solutions, Inc.
    Inventors: Jerry J. Broz, Bret A. Humphrey, Alan E. Humphrey, James H. Duvall
  • Publication number: 20190019694
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Application
    Filed: September 20, 2018
    Publication date: January 17, 2019
    Applicant: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Patent number: 10109504
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: October 23, 2018
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Patent number: 10002776
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: June 19, 2018
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Patent number: 9833818
    Abstract: A cleaning film designed to remove foreign matter and particulates from working surfaces of cleaning wafers used in semiconductor processes. These processes include wafer sort test for cleaning of probe card pins and FEOL tooling for cleaning during wafer handling equipment and wafer chucks. The debris collected on the cleaning wafer working surfaces is removed by the particle removal film allowing the debris and foreign matter to be discarded. The use of the cleaning film allows the operator to refresh the cleaning wafer without use of an outside vendor and eliminates wet washing and the use of solvents in the cleaning process.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: December 5, 2017
    Assignee: INTERNATIONAL TEST SOLUTIONS, INC.
    Inventors: Alan E. Humphrey, Jerry J. Broz, James H. Duvall
  • Patent number: 9825000
    Abstract: A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material may include a cleaning pad layer and one or more intermediate layers that have predetermined characteristics.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: November 21, 2017
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, Wayne C. Smith, Janakraj Shivlal, Bret A. Humphrey
  • Publication number: 20170136500
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Application
    Filed: January 30, 2017
    Publication date: May 18, 2017
    Applicant: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Patent number: 9595456
    Abstract: A cleaning wafer or substrate for use in cleaning, or in combination with, components of, for example, integrated chip manufacturing apparatus. The cleaning substrate can include a substrate having varying predetermined surface features, such as one or more predetermined adhesive, non-tacky, electrostatic, projection, depression, or other physical sections. The predetermined features can provide for more effective cleaning of the components with which they are used, such as an integrated chip manufacturing apparatus in the place of the integrated chip wafer. The cleaning substrate can be urged into cleaning or other position by vacuum, mechanical, electrostatic, or other forces. The cleaning substrate can adapted to accomplish a variety of functions, including abrading or polishing. The cleaning substrate may be made by a novel method of making, and it may then be used in a novel method of use I combination with chip manufacturing apparatus.
    Type: Grant
    Filed: August 20, 2013
    Date of Patent: March 14, 2017
    Assignee: International Test Solutions, Inc.
    Inventors: Alan E. Humphrey, James H. Duvall, Jerry Broz
  • Publication number: 20140338698
    Abstract: A cleaning film designed to remove foreign matter and particulates from working surfaces of cleaning wafers used in semiconductor processes. These processes include wafer sort test for cleaning of probe card pins and FEOL tooling for cleaning during wafer handling equipment and wafer chucks. The debris collected on the cleaning wafer working surfaces is removed by the particle removal film allowing the debris and foreign matter to be discarded. The use of the cleaning film allows the operator to refresh the cleaning wafer without use of an outside vendor and eliminates wet washing and the use of solvents in the cleaning process.
    Type: Application
    Filed: August 7, 2013
    Publication date: November 20, 2014
    Applicant: International Test Solutions, Inc.
    Inventors: Alan Eugene Humphrey, Jerry J. Broz, James H. Duvall
  • Patent number: 8801869
    Abstract: A cleaning device for cleaning pin contact elements and support hardware in a semiconductor testing apparatus that has a cleaning layer with a predetermined configuration appropriate for the particular pin contact elements and a substrate having a configuration to be introduced into the testing apparatus during the normal testing operating of the testing apparatus. The cleaning layer secured to the substrate has predetermined characteristics that cause the pad to clean debris the pin contact elements and support hardware when the pin contact elements and support hardware contact the pad during the normal operation of the testing machine.
    Type: Grant
    Filed: November 4, 2011
    Date of Patent: August 12, 2014
    Assignee: International Test Solutions, Inc.
    Inventors: Jerry J. Broz, Bret A. Humphrey, Alan E. Humphrey, James H. Duvall