Abstract: A multi-section laser diode control system comprising a multi-section laser diode (10), microprocessor controller (24), digital-to-analogue converter (28), driver circuit (30) and wavelength locker (14) is modified by inclusion of a locking circuit (40) which generates an analogue correction signal . . . 1 V ph responsive to measurements of the laser output made by the wavelength locker. The analogue correction signal is added to the preset phase voltage V ph asserted by the microprocessor controller to provide fast feedback that bypasses the microprocessor controller. This novel feedback is made possible by avoiding the use of the standard prior art control algorithm which requires a division calculation to be performed. Instead, novel control algorithms based purely on additions, subtractions and multiplications are used. The laser can thus be locked to its target output frequency without having to place slow analogue-to-digital and digital-to-analogue converters in the feedback control path.

Abstract: Methods and apparatus wherein subsequent permutation and inverse permutation operations provide inputs in correct order for first and second processes. Processes needing inputs in original order and processes needing inputs in permutated order can be distinguished, thereby using one of the processes as reference process. Permutation and inverse permutation operations which can fit into a turbo coding system and in systems applying the turbo coding principle. At least one permutation and one inverse permutation operation can be performed subsequently. Permutation and inverse permutation operations may be altered by scheduling linear writing and reading operation and permutated or inverse permutated writing and reading operations. These methods enable parallel execution of sub-processes, where the processes producing and consuming data can be performed in a parallel way, and the writing and reading operations to and from a memory can be performed in a parallel way.

Abstract: A replacement gate process is disclosed comprising the steps of forming a dummy gate stack on a substrate, depositing a PMD layer on the substrate and polishing this PMD layer to expose the top surface of the dummy gate stack. The dummy gate stack can be removed selective to the spacers and the PMD layer. SiC is used as spacer or CMP stop layer to improve the uniformity of the PMD CMP step. SiC can also be used as etch stop layer during the etching of the contact holes or during the formation of a T-gate.

Abstract: A method and an apparatus for removing a liquid, i.e a wet processing liquid, from a surface of at least one substrate is disclosed. A liquid is supplied on a surface of substrate. Simultaneously or thereafter besides the liquid also a gaseous substance can be supplied thereby creating at least locally a sharply defined liquid-vapor boundary. The gaseous substance and the liquid can be selected such that the gaseous substance is miscible with the liquid and when mixed with the liquid yields a mixture having a surface tension lower than that of the liquid. According to the invention, the substrate is subjected to a rotary movement at a speed to guide said liquid-vapor boundary over said substrate thereby removing said liquid from said substrate.