Abstract: Optical systems and methods including interferometric systems and methods are disclosed herein. In some embodiments, the present invention relates to a system comprising at least one light source including a deep ultraviolet light source, a lens device, a beam splitter, and a camera device. The lens device receives first light, directs at least some of that light toward a target location, receives reflected light therefrom, and directs at least some of the reflected light toward a further location, where at least part of a light path between the deep ultraviolet light source and the target location is other than at a high vacuum. The camera device is positioned at either the further location or an additional location, whereby an image is generated by the camera device based upon at least a portion of the reflected light. Also encompassed herein are interferometric lithography and optical microscopy systems.

Abstract: An optical storage device and method of operating that device are disclosed. The device includes an optical storage medium, and a light source capable of generating light that is transmitted to the medium. The light generated by the light source is at a first wavelength that is within the vacuum ultraviolet region of the electromagnetic spectrum and satisfies at least one of the following criteria: (i) the wavelength is within a 1.0 nm-wide window in the vacuum ultraviolet region of the electromagnetic spectrum at which a local minimum in the absorption coefficient of Oxygen (O2) occurs; and (ii) the absorption coefficient of Oxygen (O2) at standard temperature and pressure that corresponds to the wavelength is less than 25 atm?1 cm?1. In one embodiment, the light is at approximately 121.6 nm, and the light source is a gas discharge light source that produces light at the Hydrogen Lyman-? line.