Abstract: A Fabry-Perot laser and a micro-actuator are utilized to provide continuous tuning over a range of wavelengths.

Abstract: An apparatus and method for controlling the phase of a tunable laser is provided. Stabilization of the mode of a laser beam is provided as the laser is tuned to a target frequency. For one embodiment, a laser generates a reference beam and an output beam. The power of each of beam is measured by optical detectors, and a ratio thereof is utilized to detect when a mode hop occurs as the laser is coarsely tuned. The average of the pre and post mode hop ratios is utilized as a control setpoint while finely tuning the laser to the target frequency. Wavelength lockers, optical power dividers and optical detectors are utilized to determine power levels of the reference and output beams while also monitoring frequency characteristics thereof. A control unit utilizes the outputs from the wavelength locker to control the operation of the extended cavity laser during and after tuning.

Abstract: A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.

Abstract: An apparatus comprising a first reference element having an output power that varies monotonically with input frequency over an operating frequency range and receiving at least a portion of an output beam of light from an optical source. A second reference element having an output power that is frequency dependent receives at least a portion of the output beam of light. A first optical detector measures the power of a first reference beam of light from the first reference element. A second optical detector measures the power of a second reference beam of light from the second reference element. Electronic circuitry is coupled to the first and second optical detectors for receiving first and second reference signals therefrom and producing a coarse error signal for permitting coarse adjustment and a fine error signal for permitting fine adjustment of the frequency of the output beam of light.

Abstract: A miniature device comprising a substrate, a movable member overlying the substrate and first and second spaced-apart suspension members. Each of the first and second suspension members has a first bendable end portion coupled to the substrate and a second bendable end portion coupled to the movable member and a substantially rigid central portion. The first and second end portions of each suspension member have respective first and second lengths and the suspension member has an overall length. The sum of the first and second lengths of each suspension member ranges from 5% to 40% of the overall length of the suspension member.

Abstract: A Fabry-Perot laser and a micro-actuator are utilized to provide continuous tuning over a range of wavelengths.

Abstract: A tunable laser comprising a laser source for providing light with a wavelength along an optical path. A diffractive element is positioned in the optical path and spaced from the laser source for redirecting the light received from the laser source. A reflective element is positioned in the optical path and spaced from the diffractive element for receiving the light redirected by the diffractive element and for further redirecting the light back along the optical path to the reflective element. The diffractive element receives the light further redirected by the reflective element and returns the light along the optical path to the laser source. The optical path created by the laser source, the diffractive element and the reflective element causes the light to lase at the wavelength. At least one microactuator is coupled to one of the diffractive element and the reflective element for moving such element to select the wavelength of the light.

Abstract: A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated.

Abstract: An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.

Abstract: A micromechanical device comprising a substrate, a movable member overlying the substrate, first and second microactuators carried by the substrate and a coupling assembly for connecting the first and second microactuators to the movable member. The first microactuator moves the movable member in a first substantially linear direction and the second microactuator moves the movable member in a second substantially linear direction substantially perpendicular to the first direction. The coupling assembly includes a first linkage coupled to the first microactuator and a second linkage coupled to the second microactuator. Each of the first and second linkage has a pivot for permitting the respective linkage to pivot when moving the movable member.

Abstract: A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.

Abstract: An optical microswitch comprising a support body and first and second output fibers carried by the body. A rotary electrostatic microactuator is carried by the body and extends in a plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting a laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.

Abstract: The present invention provides a miniature device that comprises a grounded layer, an insulative layer overlying the grounded layer and a conductive layer overlying the insulative layer wherein the insulative spacing between the conductive and grounded layers is increased so as to inhibit electrical shorting between the conductive layer and grounded layers. A method of making miniature devices is also provided.

Abstract: A miniature device comprising a substrate and primary and secondary movable members overlying the substrate. First and second suspension members couple the secondary movable member to the substrate. Third and fourth suspension members couple the primary movable member to the secondary movable member. A lever assembly is provided and has a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the primary movable member and an opposite second extremity. The secondary movable member is coupled to the lever between the first extremity and the pivot.

Abstract: A rotary electrostatic microactuator that includes a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. First and second spaced-apart springs and a plurality of comb drive assemblies are included. Each of the comb drive assemblies has a first comb drive member mounted on the substrate and a second comb drive member. Each of the first and second comb drive members are provided with arcuate comb drive fingers. Each of the first and second springs has a first end portion secured to the substrate and a second end portion secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate.

Abstract: The present invention provides a brakeable microapparatus comprising a substrate and a structure overlying the substrate and movable relative to the substrate. A frictional brake overlies the structure and is movable into frictional engagement with the structure for holding the structure relative to the substrate.

Abstract: A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated.

Abstract: An actuator of the present invention includes a set of generally planar assemblies comprising cross-hinges that are disposed between a set of extended arms and a rigid mounting base. The hinges of the present invention flex to about a pivot axis to replace the pivot and bearing assembly of prior art actuators. In an exemplary embodiment the hinges are used in conjunction with a voice-coil motor (“VCM”).

Abstract: An electrostatic microactuator comprising a substrate and at least one comb drive assembly having a first comb member mounted on the substrate and a second comb member overlying the substrate. The first comb member has a plurality of first comb fingers. The second comb member has a plurality of second comb fingers. The second comb member is movable between a first position in which each second comb finger is not substantially fully interdigitated with an adjacent pair of first comb fingers and a second position in which each such second comb finger is substantially fully interdigitated with such adjacent pair of first comb fingers. Each of the second comb fingers is offset relative to the midpoint between the adjacent pair of first comb fingers when in the first position and is substantially centered on such midpoint when in the second position.

Abstract: An optical microswitch comprising a support body and first and second output fibers carried by the body. A rotary electrostatic microactuator is carried by the body and extends in a plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting a laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.