Patents Assigned to Ioneer, LLC
  • Apparatus and method for determining parameters of process operation
    Patent number: 11724354
    Abstract: Various examples of the present technology disclose a self-contained and programmable Processing Probe Apparatus (PPA) that can measure processing properties of a processing tool. The PPA comprises one or more sensors, an analog-to-digital converter and information (ADCI) processor, an electrical power source (EPS), and a digital signal communication device, all of which are attached to a flexible film. The flexible film can be mounted on a substrate that mimics a semiconductor workpiece.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: August 15, 2023
    Assignee: Ioneer, LLC
    Inventor: Anthony Chen