Patents Assigned to Ionex/HEI Corporation
  • Apparatus for generating high currents of negative ions
    Patent number: 4980556
    Abstract: Disclosed is an apparatus for the generation of large currents of negative ions for use in tandem accelerators, suitable for employment in ion implantation on an industrial production scale. The apparatus includes a high current positive ion source which is coupled to a charge exchange canal where a fraction of the positive ions are transformed into negative ions.
    Type: Grant
    Filed: March 6, 1990
    Date of Patent: December 25, 1990
    Assignee: Ionex/HEI Corporation
    Inventors: John P. O'Connor, Nicholas R. White